Aijun ZENG

Person

Shanghai, CN

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated super-resolution laser direct-writing device and direct-...
- Patent number 11,726,407
- Issue date Aug 15, 2023
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination device and method for using the same in the projection...
- Patent number 9,804,502
- Issue date Oct 31, 2017
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system for lithographic projection exposure step-and-s...
- Patent number 9,709,896
- Issue date Jul 18, 2017
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography illumination system
- Patent number 9,400,433
- Issue date Jul 26, 2016
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G02 - OPTICS
Information Patent Grant
Lithography pupil shaping optical system and method for generating...
- Patent number 9,323,052
- Issue date Apr 26, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Grant
Device and method for measuring phase retardation distribution and...
- Patent number 9,297,744
- Issue date Mar 29, 2016
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Aijun Zeng
- G01 - MEASURING TESTING
Information Patent Grant
Device and method for detecting optical performance of beam shaping...
- Patent number 9,121,788
- Issue date Sep 1, 2015
- Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences
- Jing Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED SUPER-RESOLUTION LASER DIRECT-WRITING DEVICE AND DIRECT-...
- Publication number 20220091512
- Publication date Mar 24, 2022
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR LITHOGRAPHIC PROJECTION EXPOSURE STEP-AND-S...
- Publication number 20160109808
- Publication date Apr 21, 2016
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION DEVICE AND METHOD FOR USING THE SAME IN THE PROJECTION...
- Publication number 20160109806
- Publication date Apr 21, 2016
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G02 - OPTICS
Information Patent Application
PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...
- Publication number 20160004074
- Publication date Jan 7, 2016
- Shanghai Institute of Optics and Fine Mechanics Chinese Academy of Sciences
- Fang Zhang
- G02 - OPTICS
Information Patent Application
LITHOGRAPHY ILLUMINATION SYSTEM
- Publication number 20150286144
- Publication date Oct 8, 2015
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G02 - OPTICS
Information Patent Application
DEVICE AND METHOD FOR MEASURING PHASE RETARDATION DISTRIBUTION AND...
- Publication number 20140347665
- Publication date Nov 27, 2014
- Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences
- Aijun ZENG
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING...
- Publication number 20140132952
- Publication date May 15, 2014
- SHANGHAI INSTITUTE OF OPTICS AND FINE MECHANICS CHINESE ACADEMY OF SCIENCE
- Jing Zhu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Person

Patents Grantslast 30 patents

Integrated super-resolution laser direct-writing device and direct-...

Illumination device and method for using the same in the projection...

Illumination system for lithographic projection exposure step-and-s...

Lithography illumination system

Lithography pupil shaping optical system and method for generating...

Device and method for measuring phase retardation distribution and...

Device and method for detecting optical performance of beam shaping...

Patents Applicationslast 30 patents

INTEGRATED SUPER-RESOLUTION LASER DIRECT-WRITING DEVICE AND DIRECT-...

ILLUMINATION SYSTEM FOR LITHOGRAPHIC PROJECTION EXPOSURE STEP-AND-S...

ILLUMINATION DEVICE AND METHOD FOR USING THE SAME IN THE PROJECTION...

PUPIL SHAPING OPTICAL SYSTEM FOR LITHOGRAPHY MACHINE AND METHOD FOR...

LITHOGRAPHY ILLUMINATION SYSTEM

DEVICE AND METHOD FOR MEASURING PHASE RETARDATION DISTRIBUTION AND...

DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING...