Aiko Shiga

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser irradiation method and laser irradiation device and method of...
- Patent number 10,910,219
- Issue date Feb 2, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation device and method of...
- Patent number 10,366,885
- Issue date Jul 30, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation device and method of...
- Patent number 9,748,099
- Issue date Aug 29, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation apparatus
- Patent number 8,696,808
- Issue date Apr 15, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and laser irradiation device and method of...
- Patent number 8,686,315
- Issue date Apr 1, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing SOI substrate
- Patent number 8,198,173
- Issue date Jun 12, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Hideto Ohnuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device having multichannel transistor
- Patent number 8,093,593
- Issue date Jan 10, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus, laser irradiation method, semiconductor manufactur...
- Patent number 8,044,372
- Issue date Oct 25, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser irradiation method and method of manufacturing semiconductor...
- Patent number 7,943,885
- Issue date May 17, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus, laser irradiation method, manufacturing method for...
- Patent number 7,892,952
- Issue date Feb 22, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing SOI substrate
- Patent number 7,829,432
- Issue date Nov 9, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Hideto Ohnuma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam irradiation method and method of manufacturing a thin fi...
- Patent number 7,736,917
- Issue date Jun 15, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Akihisa Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 7,670,935
- Issue date Mar 2, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,635,883
- Issue date Dec 22, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Munehiro Azami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus, laser irradiation method, semiconductor manufactur...
- Patent number 7,589,032
- Issue date Sep 15, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Manufacturing method for a thin film transistor that uses a pulse o...
- Patent number 7,510,920
- Issue date Mar 31, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabricating apparatus
- Patent number 7,439,115
- Issue date Oct 21, 2008
- Semiconductor Eneregy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of fabricating a semiconductor device utilizing crystallizat...
- Patent number 7,319,055
- Issue date Jan 15, 2008
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 7,279,372
- Issue date Oct 9, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation method that includes moving a center of rotation...
- Patent number 7,241,708
- Issue date Jul 10, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
Information Patent Grant
Method of manufacturing a semiconductor device and semiconductor ma...
- Patent number 7,217,952
- Issue date May 15, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Setsuo Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser beam irradiation method that includes determining a thickness...
- Patent number 7,176,042
- Issue date Feb 13, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Akihisa Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation method and laser irradiation device and method of...
- Patent number 7,138,306
- Issue date Nov 21, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Irradiation method of laser beam
- Patent number 7,135,389
- Issue date Nov 14, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing semiconductor device
- Patent number 7,129,121
- Issue date Oct 31, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Munehiro Azami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 7,109,069
- Issue date Sep 19, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser irradiation apparatus
- Patent number 7,105,048
- Issue date Sep 12, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing a semiconductor device by irradiating with...
- Patent number 7,087,504
- Issue date Aug 8, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Setsuo Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductror fabricating apparatus
- Patent number 7,050,878
- Issue date May 23, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of manufacturing semiconductor device using a laser irradiat...
- Patent number 7,037,809
- Issue date May 2, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...
- Publication number 20190348286
- Publication date Nov 14, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...
- Publication number 20170062214
- Publication date Mar 2, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20170025546
- Publication date Jan 26, 2017
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...
- Publication number 20140113440
- Publication date Apr 24, 2014
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro TANAKA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20120097963
- Publication date Apr 26, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SOI SUBSTRATE
- Publication number 20110039395
- Publication date Feb 17, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Hideto OHNUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SOI SUBSTRATE
- Publication number 20090325363
- Publication date Dec 31, 2009
- Semiconductor Energy Laboratory Co., Ltd.
- Hideto OHNUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser apparatus, laser irradiation method, semiconductor manufactur...
- Publication number 20070246664
- Publication date Oct 25, 2007
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser beam irradiation method and method of manufacturing a thin fi...
- Publication number 20070141733
- Publication date Jun 21, 2007
- Semicondutor Energy Laboratory Co., Ltd.
- Akihisa Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser irradiation apparatus
- Publication number 20070000428
- Publication date Jan 4, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20070004104
- Publication date Jan 4, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Munehiro Azami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20070001228
- Publication date Jan 4, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser irradiation method and laser irradiation device and method of...
- Publication number 20060215721
- Publication date Sep 28, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laser irradiation method and laser irradiation device and method of...
- Publication number 20060215722
- Publication date Sep 28, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Koichiro Tanaka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Semiconductor fabricating apparatus
- Publication number 20060155413
- Publication date Jul 13, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20060134886
- Publication date Jun 22, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for a semiconductor device
- Publication number 20060079041
- Publication date Apr 13, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of manufacturing a semiconductor device and semiconductor ma...
- Publication number 20060009015
- Publication date Jan 12, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Setsuo Nakajima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser apparatus, laser irradiation method, manufacturing method for...
- Publication number 20050277028
- Publication date Dec 15, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20050245007
- Publication date Nov 3, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Munehiro Azami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method thereof
- Publication number 20050040412
- Publication date Feb 24, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20050009251
- Publication date Jan 13, 2005
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser beam irradiation method and method of manufacturing a thin fi...
- Publication number 20040248347
- Publication date Dec 9, 2004
- Semiconductor Energy Laboratory Co., Ltd.
- Akihisa Shimomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor film, semiconductor device, and method of manufacturi...
- Publication number 20040157413
- Publication date Aug 12, 2004
- Semiconductor Energy Laboratory Co., Ltd.
- Hidekazu Miyairi
- G02 - OPTICS
Information Patent Application
Laser apparatus, laser irradiation method, manufacturing method for...
- Publication number 20040132266
- Publication date Jul 8, 2004
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Method for manufacturing semiconductor device
- Publication number 20040072411
- Publication date Apr 15, 2004
- Munehiro Azami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method for a semiconductor device
- Publication number 20030235971
- Publication date Dec 25, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20030234395
- Publication date Dec 25, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor device and manufacturing method therefor
- Publication number 20030224550
- Publication date Dec 4, 2003
- Semiconductor Energy Laboratory Co., Ltd.
- Chiho Kokubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Manufacturing method of semiconductor device
- Publication number 20030215973
- Publication date Nov 20, 2003
- Semiconductor Energy
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

Laser irradiation method and laser irradiation device and method of...

Laser irradiation method and laser irradiation device and method of...

Laser irradiation method and laser irradiation device and method of...

Laser irradiation apparatus

Laser irradiation method and laser irradiation device and method of...

Method for manufacturing SOI substrate

Semiconductor device having multichannel transistor

Laser apparatus, laser irradiation method, semiconductor manufactur...

Laser irradiation method and method of manufacturing semiconductor...

Laser apparatus, laser irradiation method, manufacturing method for...

Method for manufacturing SOI substrate

Laser beam irradiation method and method of manufacturing a thin fi...

Manufacturing method of semiconductor device

Method for manufacturing semiconductor device

Laser apparatus, laser irradiation method, semiconductor manufactur...

Manufacturing method for a thin film transistor that uses a pulse o...

Semiconductor fabricating apparatus

Method of fabricating a semiconductor device utilizing crystallizat...

Manufacturing method of semiconductor device

Laser irradiation method that includes moving a center of rotation...

Method of manufacturing a semiconductor device and semiconductor ma...

Laser beam irradiation method that includes determining a thickness...

Laser irradiation method and laser irradiation device and method of...

Irradiation method of laser beam

Method for manufacturing semiconductor device

Semiconductor device and method of manufacturing the same

Laser irradiation apparatus

Method of manufacturing a semiconductor device by irradiating with...

Semiconductror fabricating apparatus

Method of manufacturing semiconductor device using a laser irradiat...

Patents Applicationslast 30 patents

LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...

LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

LASER IRRADIATION METHOD AND LASER IRRADIATION DEVICE AND METHOD OF...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

METHOD FOR MANUFACTURING SOI SUBSTRATE

METHOD FOR MANUFACTURING SOI SUBSTRATE

Laser apparatus, laser irradiation method, semiconductor manufactur...

Laser beam irradiation method and method of manufacturing a thin fi...

Laser irradiation apparatus

Method for manufacturing semiconductor device

Semiconductor device and method of manufacturing the same

Laser irradiation method and laser irradiation device and method of...

Laser irradiation method and laser irradiation device and method of...

Semiconductor fabricating apparatus

Manufacturing method of semiconductor device

Manufacturing method for a semiconductor device

Method of manufacturing a semiconductor device and semiconductor ma...

Laser apparatus, laser irradiation method, manufacturing method for...

Method for manufacturing semiconductor device

Semiconductor device and manufacturing method thereof

Manufacturing method of semiconductor device

Laser beam irradiation method and method of manufacturing a thin fi...

Semiconductor film, semiconductor device, and method of manufacturi...

Laser apparatus, laser irradiation method, manufacturing method for...

Method for manufacturing semiconductor device

Manufacturing method for a semiconductor device

Semiconductor device and method of manufacturing the same

Semiconductor device and manufacturing method therefor

Manufacturing method of semiconductor device