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Aixi Zhang
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Santa Clara, CA, US
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last 30 patents
Information
Patent Application
SELECTIVE METAL SELECTIVITY IMPROVEMENT WITH RF PULSING
Publication number
20240222192
Publication date
Jul 4, 2024
Applied Materials, Inc.
Yi Xu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Interlayer for Resistivity Reduction in Metal Deposition Applications
Publication number
20240194527
Publication date
Jun 13, 2024
Applied Materials, Inc.
Sahil Jaykumar PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Gapfill
Publication number
20240178062
Publication date
May 30, 2024
Yi XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED PVD TUNGSTEN LINER AND SEAMLESS CVD TUNGSTEN FILL
Publication number
20240087955
Publication date
Mar 14, 2024
Applied Materials, Inc.
Yi XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING METAL GAPFILL WITH LOW RESISTIVITY
Publication number
20240088071
Publication date
Mar 14, 2024
Applied Materials, Inc.
Yi XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Purge Ring for Reduced Substrate Backside Deposition
Publication number
20240018648
Publication date
Jan 18, 2024
Applied Materials, Inc.
Geraldine VASQUEZ
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
NITROGEN PLASMA TREATMENT FOR BOTTOM-UP GROWTH
Publication number
20240014072
Publication date
Jan 11, 2024
Applied Materials, Inc.
Tsung-Han YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TREATMENT OF TUNGSTEN SURFACE FOR TUNGSTEN GAP-FILL
Publication number
20230420295
Publication date
Dec 28, 2023
Applied Materials, Inc.
Tsung-Han YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE METAL REMOVAL WITH FLOWABLE POLYMER
Publication number
20230386833
Publication date
Nov 30, 2023
Applied Materials, Inc.
Liqi Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GRADIENT OXIDATION AND ETCH FOR PVD METAL AS BOTTOM LINER IN BOTTOM...
Publication number
20230343643
Publication date
Oct 26, 2023
Applied Materials, Inc.
Chih-Hsun HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF FIELD-SUPPRESSION CVD TUNGSTEN (W) FILL ON PVD W LINER
Publication number
20230326791
Publication date
Oct 12, 2023
Applied Materials, Inc.
Zhimin QI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED CLEANING AND SELECTIVE MOLYBDENUM DEPOSITION PROCESSES
Publication number
20230323543
Publication date
Oct 12, 2023
Applied Materials, Inc.
Tuerxun Ailihumaer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...