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Ajay Saproo
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Mountain View, CA, US
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last 30 patents
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Patent Grant
Predictive wafer temperature control system and method
Patent number
6,468,384
Issue date
Oct 22, 2002
Novellus Systems, Inc.
Vikram Singh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Annealing process for low-k dielectric film
Patent number
6,296,906
Issue date
Oct 2, 2001
Novellus Systems, Inc.
Jim Stimmell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing nitrogen surface treated fluorine doped silico...
Patent number
5,869,149
Issue date
Feb 9, 1999
Lam Research Corporation
Dean R. Denison
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...