Akao TOKUNOBU

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 12,050,138
- Issue date Jul 30, 2024
- Kokusai Electric Corporation
- Akihiro Osaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate temperature sensor, substrate retainer and substrate proc...
- Patent number 11,906,367
- Issue date Feb 20, 2024
- Kokusai Electric Corporation
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature sensor
- Patent number D976129
- Issue date Jan 24, 2023
- Kokusai Electric Corporation
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 11,300,456
- Issue date Apr 12, 2022
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,684,174
- Issue date Jun 16, 2020
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, and thermocouple
- Patent number 10,228,291
- Issue date Mar 12, 2019
- Kokusai Electric Corporation
- Akihiro Osaka
- G01 - MEASURING TESTING
Information Patent Grant
Protector tube for thermocouple
- Patent number D819463
- Issue date Jun 5, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Protector tube for thermocouple
- Patent number D818850
- Issue date May 29, 2018
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Thermometry tool for substrate processing apparatus
- Patent number D803075
- Issue date Nov 21, 2017
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- D10 - Measuring, testing, or signalling instruments
Information Patent Grant
Substrate processing apparatus having rotatable slot-type antenna a...
- Patent number 8,987,645
- Issue date Mar 24, 2015
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing apparatus
- Patent number 8,795,433
- Issue date Aug 5, 2014
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,557,720
- Issue date Oct 15, 2013
- Hitachi Kokusai Electric, Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing a semico...
- Patent number 8,486,222
- Issue date Jul 16, 2013
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device, substrate conveying device, and substr...
- Patent number 6,742,977
- Issue date Jun 1, 2004
- Kokusai Electric Co., Ltd.
- Satohiro Okayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying apparatus
- Patent number 5,957,651
- Issue date Sep 28, 1999
- Kokusai Electric Co., Ltd.
- Yuji Takebayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate heating equipment for use in a semiconductor fabricating...
- Patent number 5,850,071
- Issue date Dec 15, 1998
- Kokusai Electric Co., Ltd.
- Issei Makiguchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...
- Publication number 20240151591
- Publication date May 9, 2024
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220139737
- Publication date May 5, 2022
- Kokusai Electric Corporation
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20220082447
- Publication date Mar 17, 2022
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...
- Publication number 20210181033
- Publication date Jun 17, 2021
- Kokusai Electric Corporation
- Tokunobu AKAO
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20200166413
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20180328790
- Publication date Nov 15, 2018
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160365264
- Publication date Dec 15, 2016
- Hitachi Kokusai Electric Inc.
- Akao TOKUNOBU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE
- Publication number 20160245704
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Akihiro OSAKA
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20120129358
- Publication date May 24, 2012
- Hitachi Kokusai Electric Inc.
- Unryu OGAWA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108080
- Publication date May 3, 2012
- Hitachi Kokusai Electric Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...
- Publication number 20120108061
- Publication date May 3, 2012
- Hitachi Kokusai Electric, Inc.
- Tokunobu AKAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20090229518
- Publication date Sep 17, 2009
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- G05 - CONTROLLING REGULATING
Information Patent Application
Data Logging Method
- Publication number 20080288217
- Publication date Nov 20, 2008
- Hitachi Kokusai Electric Inc.
- Tokunobu Akao
- G01 - MEASURING TESTING
Information Patent Application
Substrate processing apparatus and semiconductor manufacturing method
- Publication number 20010035124
- Publication date Nov 1, 2001
- Satohiro Okayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akao TOKUNOBU

Person

Patents Grantslast 30 patents

Substrate processing apparatus, and thermocouple

Substrate temperature sensor, substrate retainer and substrate proc...

Temperature sensor

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, and thermocouple

Substrate processing apparatus, and thermocouple

Protector tube for thermocouple

Protector tube for thermocouple

Thermometry tool for substrate processing apparatus

Substrate processing apparatus having rotatable slot-type antenna a...

Substrate processing apparatus

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing apparatus and method of manufacturing a semico...

Substrate processing device, substrate conveying device, and substr...

Substrate carrying apparatus

Substrate heating equipment for use in a semiconductor fabricating...

Patents Applicationslast 30 patents

SUBSTRATE TEMPERATURE SENSOR, SUBSTRATE RETAINER AND SUBSTRATE PROC...

TEMPERATURE SENSOR, HEATER UNIT, AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

Substrate Temperature Sensor, Substrate Retainer and Substrate Proc...

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, AND THERMOCOUPLE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING A SEMICO...

Substrate processing apparatus

Data Logging Method

Substrate processing apparatus and semiconductor manufacturing method