Akhil Singhal

Person

Beaverton, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method to clean SnO2 film from chamber
- Patent number 11,915,923
- Issue date Feb 27, 2024
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition tool and method for depositing metal oxide films on orga...
- Patent number 11,887,846
- Issue date Jan 30, 2024
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Profile shaping for control gate recesses
- Patent number 11,784,229
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching metal-oxide and protecting chamber components
- Patent number 11,717,866
- Issue date Aug 8, 2023
- Lam Research Corporation
- Akhil N. Singhal
- B08 - CLEANING
Information Patent Grant
Metal-containing passivation for high aspect ratio etch
- Patent number 11,670,516
- Issue date Jun 6, 2023
- Lam Research Corporation
- Karthik S. Colinjivadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of seasoning electrostatic chucks with dielectr...
- Patent number 11,646,216
- Issue date May 9, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modification of SNO2 surface for EUV lithography
- Patent number 11,031,244
- Issue date Jun 8, 2021
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,957,514
- Issue date Mar 23, 2021
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to clean SnO2 film from chamber
- Patent number 10,840,082
- Issue date Nov 17, 2020
- Lam Research Corporation
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of encapsulation
- Patent number 10,763,107
- Issue date Sep 1, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of encapsulation
- Patent number 10,566,186
- Issue date Feb 18, 2020
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 10,373,806
- Issue date Aug 6, 2019
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of encapsulation
- Patent number 10,157,736
- Issue date Dec 18, 2018
- Lam Research Corporation
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect control in RF plasma substrate processing systems using DC b...
- Patent number 10,081,869
- Issue date Sep 25, 2018
- Lam Research Corporation
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for deposition and etch in gap fill
- Patent number 9,773,643
- Issue date Sep 26, 2017
- Lam Research Corporation
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for improving deposition rate uniformity and re...
- Patent number 9,617,637
- Issue date Apr 11, 2017
- Lam Research Corporation
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the reduction of defectivity in vapor deposited films
- Patent number 9,328,416
- Issue date May 3, 2016
- Lam Research Corporation
- Arul N. Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for making high stress boron-doped carbon films
- Patent number 7,998,881
- Issue date Aug 16, 2011
- Novellus Systems, Inc.
- Qingguo Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PMOS transistor with compressive dielectric capping layer
- Patent number 7,327,001
- Issue date Feb 5, 2008
- Novellus Systems, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PMOS transistor with compressive dielectric capping layer
- Patent number 7,214,630
- Issue date May 8, 2007
- Novellus Systems, Inc.
- Bhadri N. Varadarajan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...
- Publication number 20240332000
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
- Publication number 20240096605
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Arun Kumar Kotrappa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20230411462
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20230274968
- Publication date Aug 31, 2023
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED SELF ALIGNED MULTIPLE PATTERNING USING TIN OXIDE
- Publication number 20230238238
- Publication date Jul 27, 2023
- LAM RESEARCH CORPORATION
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CORE REMOVAL
- Publication number 20230066676
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- Sivananda Krishnan KANAKASABAPATHY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROTECTIVE COATING FOR A SEMICONDUCTOR REACTION CHAMBER
- Publication number 20230038880
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HELIUM-FREE SILICON FORMATION
- Publication number 20220336216
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Zeqiong Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
- Publication number 20220258216
- Publication date Aug 18, 2022
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- B08 - CLEANING
Information Patent Application
EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY USING AN INTERVENING LAYER OR...
- Publication number 20220197147
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Andrew LIANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROFILE SHAPING FOR CONTROL GATE RECESSES
- Publication number 20220123114
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...
- Publication number 20220122872
- Publication date Apr 21, 2022
- Applied Materials, Inc.
- Akhil Singhal
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
BUBBLE DEFECT REDUCTION
- Publication number 20220004103
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU PROTECTIVE COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR...
- Publication number 20210340670
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS
- Publication number 20210308726
- Publication date Oct 7, 2021
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- B08 - CLEANING
Information Patent Application
METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH
- Publication number 20210242032
- Publication date Aug 5, 2021
- LAM RESEARCH CORPORATION
- Karthik S. COLINJIVADI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO CLEAN SNO2 FILM FROM CHAMBER
- Publication number 20210057208
- Publication date Feb 25, 2021
- LAM RESEARCH CORPORATION
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGA...
- Publication number 20200199751
- Publication date Jun 25, 2020
- LAM RESEARCH CORPORATION
- Akhil SINGHAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20200152452
- Publication date May 14, 2020
- LAM RESEARCH CORPORATION
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODIFICATION OF SNO2 SURFACE FOR EUV LITHOGRAPHY
- Publication number 20200058492
- Publication date Feb 20, 2020
- LAM RESEARCH CORPORATION
- Akhil Singhal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO CLEAN SNO2 FILM FROM CHAMBER
- Publication number 20200051807
- Publication date Feb 13, 2020
- LAM RESEARCH CORPORATION
- Akhil Singhal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGA...
- Publication number 20190390341
- Publication date Dec 26, 2019
- LAM RESEARCH CORPORATION
- Akhil SINGHAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
- Publication number 20190385820
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL SYSTEMS AND METHODS FOR REMOVING METAL OXIDE FILMS
- Publication number 20190385828
- Publication date Dec 19, 2019
- LAM RESEARCH CORPORATION
- Akhil N. Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20190157078
- Publication date May 23, 2019
- Lam Research Corporation
- Bart J. van Schravendijk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL
- Publication number 20180005801
- Publication date Jan 4, 2018
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO DEPOSIT CONFORMAL AND LOW WET ETCH RATE ENCAPSULATION LAY...
- Publication number 20170323785
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF ENCAPSULATION
- Publication number 20170323803
- Publication date Nov 9, 2017
- LAM RESEARCH CORPORATION
- Bart J. van Schravendijk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND RE...
- Publication number 20160017493
- Publication date Jan 21, 2016
- LAM RESEARCH CORPORATION
- Arul Dhas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFECT CONTROL IN RF PLASMA SUBSTRATE PROCESSING SYSTEMS USING DC B...
- Publication number 20150357161
- Publication date Dec 10, 2015
- LAM RESEARCH CORPORATION
- Edward Augustyniak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akhil Singhal

Person

Patents Grantslast 30 patents

Method to clean SnO2 film from chamber

Deposition tool and method for depositing metal oxide films on orga...

Profile shaping for control gate recesses

Etching metal-oxide and protecting chamber components

Metal-containing passivation for high aspect ratio etch

Systems and methods of seasoning electrostatic chucks with dielectr...

Modification of SNO2 surface for EUV lithography

Apparatus and method for deposition and etch in gap fill

Method to clean SnO2 film from chamber

Methods of encapsulation

Methods of encapsulation

Apparatus and method for deposition and etch in gap fill

Methods of encapsulation

Defect control in RF plasma substrate processing systems using DC b...

Apparatus and method for deposition and etch in gap fill

Systems and methods for improving deposition rate uniformity and re...

Method for the reduction of defectivity in vapor deposited films

Method for making high stress boron-doped carbon films

PMOS transistor with compressive dielectric capping layer

PMOS transistor with compressive dielectric capping layer

Patents Applicationslast 30 patents

DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...

BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT

PROFILE SHAPING FOR CONTROL GATE RECESSES

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

ADVANCED SELF ALIGNED MULTIPLE PATTERNING USING TIN OXIDE

CORE REMOVAL

PROTECTIVE COATING FOR A SEMICONDUCTOR REACTION CHAMBER

HELIUM-FREE SILICON FORMATION

ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY USING AN INTERVENING LAYER OR...

PROFILE SHAPING FOR CONTROL GATE RECESSES

SYSTEMS AND METHODS OF SEASONING ELECTROSTATIC CHUCKS WITH DIELECTR...

BUBBLE DEFECT REDUCTION

IN SITU PROTECTIVE COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR...

ETCHING METAL-OXIDE AND PROTECTING CHAMBER COMPONENTS

METAL-CONTAINING PASSIVATION FOR HIGH ASPECT RATIO ETCH

METHOD TO CLEAN SNO2 FILM FROM CHAMBER

DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGA...

METHODS OF ENCAPSULATION

MODIFICATION OF SNO2 SURFACE FOR EUV LITHOGRAPHY

METHOD TO CLEAN SNO2 FILM FROM CHAMBER

DEPOSITION TOOL AND METHOD FOR DEPOSITING METAL OXIDE FILMS ON ORGA...

APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL

TEMPERATURE CONTROL SYSTEMS AND METHODS FOR REMOVING METAL OXIDE FILMS

METHODS OF ENCAPSULATION

APPARATUS AND METHOD FOR DEPOSITION AND ETCH IN GAP FILL

METHOD TO DEPOSIT CONFORMAL AND LOW WET ETCH RATE ENCAPSULATION LAY...

METHODS OF ENCAPSULATION

SYSTEMS AND METHODS FOR IMPROVING DEPOSITION RATE UNIFORMITY AND RE...

DEFECT CONTROL IN RF PLASMA SUBSTRATE PROCESSING SYSTEMS USING DC B...