Aki AKIBA

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Beijing, CN

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Patents Grantslast 30 patents

Information Patent Grant
Etching method with metal hard mask
- Patent number 12,100,601
- Issue date Sep 24, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yu Zhang
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD WITH METAL HARD MASK
- Publication number 20240112923
- Publication date Apr 4, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yu ZHANG
- B08 - CLEANING