Aki Takei

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Patents Grantslast 30 patents

Information Patent Grant
Electron source and charged particle beam device
- Patent number 11,929,230
- Issue date Mar 12, 2024
- HITACHI HIGH-TECH CORPORATION
- Keigo Kasuya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermoelectric field emission electron source and electron beam app...
- Patent number 11,508,544
- Issue date Nov 22, 2022
- HITACHI HIGH-TECH CORPORATION
- Soichiro Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND CLEANING METHOD OF SEMICO...
- Publication number 20240191348
- Publication date Jun 13, 2024
- Hitachi High-Tech Corporation
- Masaki YAMADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRON SOURCE AND CHARGED PARTICLE BEAM DEVICE
- Publication number 20220199349
- Publication date Jun 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Keigo KASUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOELECTRIC FIELD EMISSION ELECTRON SOURCE AND ELECTRON BEAM APP...
- Publication number 20220037107
- Publication date Feb 3, 2022
- Hitachi High-Tech Corporation
- Soichiro Matsunaga
- H01 - BASIC ELECTRIC ELEMENTS