Akifumi YAO

Person

Ube-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for producing tungsten hexafluoride
- Patent number 12,145,857
- Issue date Nov 19, 2024
- Central Glass Company, Limited
- Akiou Kikuchi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and device for etching silicon oxide
- Patent number 12,125,709
- Issue date Oct 22, 2024
- Central Glass Company, Limited
- Shoi Suzuki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method and device for etching silicon oxide
- Patent number 11,715,641
- Issue date Aug 1, 2023
- Central Glass Company, Limited
- Shoi Suzuki
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Carbon black for batteries, coating liquid for batteries, positive...
- Patent number 11,658,278
- Issue date May 23, 2023
- DENKA COMPANY LIMITED
- Shinichiro Osumi
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Dry etching method, method for manufacturing semiconductor device,...
- Patent number 11,618,954
- Issue date Apr 4, 2023
- Central Glass Company, Limited
- Yuuta Takeda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching agent, dry etching method and method for producing semi...
- Patent number 11,566,177
- Issue date Jan 31, 2023
- Central Glass Company, Limited
- Hiroyuki Oomori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing filled container, and filled container
- Patent number 11,519,557
- Issue date Dec 6, 2022
- Central Glass Company, Limited
- Akifumi Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing gas, storage container, and substrate processi...
- Patent number 11,447,697
- Issue date Sep 20, 2022
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Treatment method and cleaning method for metal oxyfluorides
- Patent number 11,359,278
- Issue date Jun 14, 2022
- Central Glass Company, Limited
- Masakiyo Nagatomo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method and β-diketone-filled container
- Patent number 11,335,573
- Issue date May 17, 2022
- Cental Glass Company, Limited
- Kunihiro Yamauchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dry etching method
- Patent number 11,289,340
- Issue date Mar 29, 2022
- Central Glass Company, Limited
- Shoi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching device
- Patent number 11,282,714
- Issue date Mar 22, 2022
- Central Glass Company, Limited
- Akifumi Yao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method, semiconductor device manufacturing method, and...
- Patent number 11,049,729
- Issue date Jun 29, 2021
- Central Glass Company, Limited
- Shoi Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Etching method and etching device
- Patent number 10,957,554
- Issue date Mar 23, 2021
- Central Glass Company, Limited
- Kunihiro Yamauchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for purifying fluorine compound gas
- Patent number 10,926,211
- Issue date Feb 23, 2021
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Dry etching agent composition and dry etching method
- Patent number 10,872,780
- Issue date Dec 22, 2020
- Central Glass Company, Limited
- Hiroyuki Oomori
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Dry etching method
- Patent number 10,741,406
- Issue date Aug 11, 2020
- Central Glass Company, Limited
- Hiroyuki Oomori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching gas and dry etching method
- Patent number 10,457,866
- Issue date Oct 29, 2019
- Central Glass Company, Limited
- Yosuke Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Naturally oxidized film removing method and naturally oxidized film...
- Patent number 10,460,946
- Issue date Oct 29, 2019
- Tokyo Electron Limited
- Jun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method and etching apparatus
- Patent number 9,991,138
- Issue date Jun 5, 2018
- Tokyo Electron Limited
- Jun Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method and dry etching agent
- Patent number 9,929,021
- Issue date Mar 27, 2018
- Central Glass Company, Limited
- Hiroyuki Oomori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas generation device
- Patent number 9,708,720
- Issue date Jul 18, 2017
- Central Glass Company, Limited
- Akifumi Yao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for synthesizing fluorine compound by electrolysis and elect...
- Patent number 9,238,872
- Issue date Jan 19, 2016
- Central Glass Company, Limited
- Isamu Mori
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Fluorine gas generator
- Patent number 9,194,050
- Issue date Nov 24, 2015
- Central Glass Company, Limited
- Takuya Kita
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluorine gas generating apparatus
- Patent number 9,139,918
- Issue date Sep 22, 2015
- Central Glass Company, Limited
- Akifumi Yao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Process for production of dispersion of fluorinated nano diamond
- Patent number 8,961,631
- Issue date Feb 24, 2015
- Central Glass Company, Limited
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluorine gas generating apparatus
- Patent number 8,951,393
- Issue date Feb 10, 2015
- Central Glass Company, Limited
- Akifumi Yao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Fluorine gas generating apparatus
- Patent number 8,864,961
- Issue date Oct 21, 2014
- Central Glass Company, Limited
- Akiou Kikuchi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fluorine gas generating apparatus
- Patent number 8,864,960
- Issue date Oct 21, 2014
- Central Glass Company, Limited
- Akifumi Yao
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method for preparing fluorinated nanodiamond liquid dispersion
- Patent number 8,790,541
- Issue date Jul 29, 2014
- Central Glass Co., Ltd.
- Akifumi Yao
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20250014906
- Publication date Jan 9, 2025
- Central Glass Company, Limited
- Shoi SUZUKI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR PURIFYING TRIALKYLAMINE, TRIALKYLAMINE PRODUCTION METHOD...
- Publication number 20240254074
- Publication date Aug 1, 2024
- Central Glass Company, Limited
- Ryosuke SAWAMURA
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20230274944
- Publication date Aug 31, 2023
- Central Glass Company, Limited
- Shoi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR SUPPLYING COMPOSITION, COMPOSITION AND DRY ETCHING METHOD
- Publication number 20230167361
- Publication date Jun 1, 2023
- Central Glass Company, Limited
- Takahisa TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND...
- Publication number 20230132629
- Publication date May 4, 2023
- Central Glass Company, Limited
- Ryosuke SAWAMURA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Dry Etching Method, Method for Producing Semiconductor Device, and...
- Publication number 20220415667
- Publication date Dec 29, 2022
- Central Glass Company, Limited
- Kunihiro YAMAUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRY ETCHING METHOD
- Publication number 20220172956
- Publication date Jun 2, 2022
- Central Glass Company, Limited
- Shoi SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,...
- Publication number 20220056593
- Publication date Feb 24, 2022
- Central Glass Company, Limited
- Yuuta TAKEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR ETCHING SILICON OXIDE
- Publication number 20210375634
- Publication date Dec 2, 2021
- Central Glass Company, Limited
- Shoi SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING METHOD AND ETCHING DEVICE
- Publication number 20210287915
- Publication date Sep 16, 2021
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Producing Tungsten Hexafluoride
- Publication number 20210253442
- Publication date Aug 19, 2021
- Central Glass Company, Limited
- Akiou KIKUCHI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Treatment Method and Cleaning Method for Metal Oxyfluorides
- Publication number 20210115556
- Publication date Apr 22, 2021
- Central Glass Company, Limited
- Masakiyo NAGATOMO
- C01 - INORGANIC CHEMISTRY
Information Patent Application
SUBSTRATE PROCESSING GAS, STORAGE CONTAINER, AND SUBSTRATE PROCESSI...
- Publication number 20210054275
- Publication date Feb 25, 2021
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry Etching Method
- Publication number 20200365411
- Publication date Nov 19, 2020
- Central Glass Company, Limited
- Shoi SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Tungsten Hexafluoride Production Method
- Publication number 20200247685
- Publication date Aug 6, 2020
- Central Glass Company, Limited
- Masakiyo NAGATOMO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CARBON BLACK FOR BATTERIES, COATING LIQUID FOR BATTERIES, POSITIVE...
- Publication number 20200227721
- Publication date Jul 16, 2020
- DENKA COMPANY LIMITED
- Shinichiro OSUMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Manufacturing Filled Container, and Filled Container
- Publication number 20200173009
- Publication date Jun 4, 2020
- Central Glass Company, Limited
- Akifumi YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Etching Method and Etching Device
- Publication number 20200066541
- Publication date Feb 27, 2020
- Central Glass Company, Limited
- Kunihiro YAMAUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Method, Semiconductor Device Manufacturing Method, and...
- Publication number 20190355590
- Publication date Nov 21, 2019
- Central Glass Company, Limited
- Shoi SUZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Agent, Dry Etching Method and Method for Producing Semi...
- Publication number 20190345385
- Publication date Nov 14, 2019
- Central Glass Company, Limited
- Hiroyuki OOMORI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Dry Etching Method and Beta-Diketone-Filled Container
- Publication number 20190348307
- Publication date Nov 14, 2019
- Central Glass Company, Limited
- Kunihiro YAMAUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Agent Composition and Dry Etching Method
- Publication number 20190287812
- Publication date Sep 19, 2019
- Central Glass Company, Limited
- Hiroyuki OOMORI
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Method for Purifying Fluorine Compound Gas
- Publication number 20190046917
- Publication date Feb 14, 2019
- Central Glass Company, Limited
- Akifumi YAO
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method for Purifying Fluorine Gas
- Publication number 20190047858
- Publication date Feb 14, 2019
- Central Glass Company, Limited
- Akifumi YAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Solvent Used for Same Method
- Publication number 20180323076
- Publication date Nov 8, 2018
- Central Glass Company ,Limited
- Akifumi YAO
- B08 - CLEANING
Information Patent Application
NATURALLY OXIDIZED FILM REMOVING METHOD AND NATURALLY OXIDIZED FILM...
- Publication number 20180211844
- Publication date Jul 26, 2018
- TOKYO ELECTRON LIMITED
- Jun LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR PRODUCING SAME
- Publication number 20180212131
- Publication date Jul 26, 2018
- CENTRAL GLASS COMPANY, LIMITED
- Akiou KIKUCHI
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Dry Etching Method
- Publication number 20180204728
- Publication date Jul 19, 2018
- Central Glass Company, Limited
- Hiroyuki OOMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wet Etching Method and Etching Solution
- Publication number 20180138053
- Publication date May 17, 2018
- Central Glass Company, Limited
- Akifumi YAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dry Etching Gas and Dry Etching Method
- Publication number 20180066187
- Publication date Mar 8, 2018
- Central Glass Company, Limited
- Yosuke NAKAMURA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...

Akifumi YAO

Person

Patents Grantslast 30 patents

Method for producing tungsten hexafluoride

Method and device for etching silicon oxide

Method and device for etching silicon oxide

Carbon black for batteries, coating liquid for batteries, positive...

Dry etching method, method for manufacturing semiconductor device,...

Dry etching agent, dry etching method and method for producing semi...

Method for manufacturing filled container, and filled container

Substrate processing gas, storage container, and substrate processi...

Treatment method and cleaning method for metal oxyfluorides

Dry etching method and β-diketone-filled container

Dry etching method

Etching method and etching device

Dry etching method, semiconductor device manufacturing method, and...

Etching method and etching device

Method for purifying fluorine compound gas

Dry etching agent composition and dry etching method

Dry etching method

Dry etching gas and dry etching method

Naturally oxidized film removing method and naturally oxidized film...

Etching method and etching apparatus

Dry etching method and dry etching agent

Gas generation device

Method for synthesizing fluorine compound by electrolysis and elect...

Fluorine gas generator

Fluorine gas generating apparatus

Process for production of dispersion of fluorinated nano diamond

Fluorine gas generating apparatus

Fluorine gas generating apparatus

Fluorine gas generating apparatus

Method for preparing fluorinated nanodiamond liquid dispersion

Patents Applicationslast 30 patents

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

METHOD FOR PURIFYING TRIALKYLAMINE, TRIALKYLAMINE PRODUCTION METHOD...

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

METHOD FOR SUPPLYING COMPOSITION, COMPOSITION AND DRY ETCHING METHOD

DRY ETCHING METHOD, METHOD FOR PRODUCING SEMICONDUCTOR DEVICE, AND...

Dry Etching Method, Method for Producing Semiconductor Device, and...

DRY ETCHING METHOD

DRY ETCHING METHOD, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE,...

METHOD AND DEVICE FOR ETCHING SILICON OXIDE

ETCHING METHOD AND ETCHING DEVICE

Method for Producing Tungsten Hexafluoride

Treatment Method and Cleaning Method for Metal Oxyfluorides

SUBSTRATE PROCESSING GAS, STORAGE CONTAINER, AND SUBSTRATE PROCESSI...

Dry Etching Method

Tungsten Hexafluoride Production Method

CARBON BLACK FOR BATTERIES, COATING LIQUID FOR BATTERIES, POSITIVE...

Method for Manufacturing Filled Container, and Filled Container

Etching Method and Etching Device

Dry Etching Method, Semiconductor Device Manufacturing Method, and...

Dry Etching Agent, Dry Etching Method and Method for Producing Semi...

Dry Etching Method and Beta-Diketone-Filled Container

Dry Etching Agent Composition and Dry Etching Method

Method for Purifying Fluorine Compound Gas

Method for Purifying Fluorine Gas

Substrate Processing Method and Solvent Used for Same Method

NATURALLY OXIDIZED FILM REMOVING METHOD AND NATURALLY OXIDIZED FILM...

THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR PRODUCING SAME

Dry Etching Method

Wet Etching Method and Etching Solution

Dry Etching Gas and Dry Etching Method