Akihiko Hiroe

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing system, plasma measurement system, plasma measure...
- Patent number 8,241,457
- Issue date Aug 14, 2012
- Tokyo Electron Limited
- Mitsuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Distributor and distributing method, plasma processing system and m...
- Patent number 7,582,569
- Issue date Sep 1, 2009
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING METHOD, SEMICONDUCTOR MANUFACTURING APP...
- Publication number 20090050895
- Publication date Feb 26, 2009
- TOKYO ELECTRON LIMITED
- Akihiko Hiroe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, PLASMA MEASUREMENT SYSTEM, PLASMA MEASURE...
- Publication number 20080241016
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Mitsuo KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Distributor and distributing method, plasma processing system and m...
- Publication number 20070133919
- Publication date Jun 14, 2007
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microwave plasma processing method, microwave plasma processing app...
- Publication number 20070054064
- Publication date Mar 8, 2007
- Tadahiro Ohmi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR