Akihiko Isao

Person

Saitama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,282,308
- Issue date Oct 16, 2007
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shifter film and process for the same
- Patent number 7,090,947
- Issue date Aug 15, 2006
- Ulvac Coating Corporation
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,689,515
- Issue date Feb 10, 2004
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shift photo mask blank, phase-shift photo mask and method for...
- Patent number 6,569,577
- Issue date May 27, 2003
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Patent number 6,228,541
- Issue date May 8, 2001
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase-shifting photomask blank and method of manufacturing the same...
- Patent number 5,952,128
- Issue date Sep 14, 1999
- Ulvac Coating Corporation
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing phase-shifting photomask blank
- Patent number 5,938,897
- Issue date Aug 17, 1999
- Ulcoat (Ulvac Coating Corporation)
- Akihiko Isao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,830,607
- Issue date Nov 3, 1998
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,691,090
- Issue date Nov 25, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,674,647
- Issue date Oct 7, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,629,114
- Issue date May 13, 1997
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase-shifting photomask blank, phase-shifting photomask, and metho...
- Patent number 5,605,776
- Issue date Feb 25, 1997
- Ulvac Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof
- Patent number 5,482,799
- Issue date Jan 9, 1996
- Mitsubishi Denki Kabushiki Kaisha
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Phase shift mask and manufacturing method thereof and exposure meth...
- Patent number 5,474,864
- Issue date Dec 12, 1995
- ULVAC Coating Corporation
- Akihiko Isao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Phase shifter film and process for the same
- Publication number 20070009810
- Publication date Jan 11, 2007
- ULVAC COATING CORPORATION
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Phase shifter film and process for the same
- Publication number 20020009653
- Publication date Jan 24, 2002
- ULVAC COATING CORPORATION and MITSUBISHI DENKI KABUSHIKI KAISHA
- Susumu Kawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Phase-shifting photomask blank, phase-shifting photomask, method fo...
- Publication number 20010018154
- Publication date Aug 30, 2001
- Ulvac Coating Corporation
- Nobuyuki Yoshioka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akihiko Isao

Person

Patents Grantslast 30 patents

Phase shifter film and process for the same

Phase shifter film and process for the same

Phase-shifting photomask blank, phase-shifting photomask, method fo...

Phase-shift photo mask blank, phase-shift photo mask and method for...

Phase-shifting photomask blank, phase-shifting photomask, method fo...

Phase-shifting photomask blank and method of manufacturing the same...

Method of manufacturing phase-shifting photomask blank

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase shift mask and manufacturing method thereof and exposure meth...

Phase-shifting photomask blank, phase-shifting photomask, and metho...

Phase shift mask and manufacturing method thereof

Phase shift mask and manufacturing method thereof and exposure meth...

Patents Applicationslast 30 patents

Phase shifter film and process for the same

Phase shifter film and process for the same

Phase-shifting photomask blank, phase-shifting photomask, method fo...