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Akihiko Kawamura
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Method of obtaining position, exposure method, and method of manufa...
Patent number
10,031,429
Issue date
Jul 24, 2018
Canon Kabushiki Kaisha
Masatoshi Endo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
Patent number
9,880,475
Issue date
Jan 30, 2018
Canon Kabushiki Kaisha
Shinichiro Koga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography apparatus, lithography method, lithography system, stor...
Patent number
9,423,700
Issue date
Aug 23, 2016
Canon Kabushiki Kaisha
Shinichiro Koga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning method, lithography apparatus and system, and article ma...
Patent number
9,377,702
Issue date
Jun 28, 2016
Canon Kabushiki Kaisha
Akihiko Kawamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
INFORMATION PROCESSING APPARATUS AND MONITORING METHOD FOR DETECTIN...
Publication number
20220412894
Publication date
Dec 29, 2022
Canon Kabushiki Kaisha
Akihiko Kawamura
G01 - MEASURING TESTING
Information
Patent Application
INFORMATION PROCESSING DEVICE, DETERMINATION METHOD, MOLDING DEFECT...
Publication number
20220019180
Publication date
Jan 20, 2022
Canon Kabushiki Kaisha
Yuki SAMEJIMA
G05 - CONTROLLING REGULATING
Information
Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
Publication number
20160334714
Publication date
Nov 17, 2016
Canon Kabushiki Kaisha
Shinichiro Koga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING METHOD, LITHOGRAPHY APPARATUS AND SYSTEM, AND ARTICLE MA...
Publication number
20150205211
Publication date
Jul 23, 2015
Canon Kabushiki Kaisha
Akihiko Kawamura
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF OBTAINING POSITION, EXPOSURE METHOD, AND METHOD OF MANUFA...
Publication number
20150074621
Publication date
Mar 12, 2015
Canon Kabushiki Kaisha
Masatoshi Endo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LITHOGRAPHY APPARATUS, LITHOGRAPHY METHOD, LITHOGRAPHY SYSTEM, STOR...
Publication number
20150022793
Publication date
Jan 22, 2015
Canon Kabushiki Kaisha
Shinichiro Koga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY