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Akihiko Mitsuda

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  • Kudamatsu, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method
    • Patent number 6,914,207
    • Issue date Jul 5, 2005
    • Hitachi High-Technologies Corporation
    • Tadayoshi Kawaguchi
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma processing method
    • Publication number 20040079733
    • Publication date Apr 29, 2004
    • Tadayoshi Kawaguchi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Plasma processing method and apparatus
    • Publication number 20030160024
    • Publication date Aug 28, 2003
    • Tadayashi Kawaguchi
    • H01 - BASIC ELECTRIC ELEMENTS