Akihiko Morita

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Shimogyo-ku, JP

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Patents Grantslast 30 patents

Information Patent Grant
Filter coupling device and a substrate treating apparatus having same
- Patent number 10,617,983
- Issue date Apr 14, 2020
- SCREEN Holdings Co., Ltd.
- Masahito Kashiyama
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate transport apparatus and heat treatment apparatus
- Patent number 8,383,990
- Issue date Feb 26, 2013
- Sokudo Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FILTER COUPLING DEVICE AND A SUBSTRATE TREATING APPARATUS HAVING SAME
- Publication number 20170120173
- Publication date May 4, 2017
- SCREEN Holdings Co., Ltd.
- Masahito KASHIYAMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE CLEANING AND DRYING METHOD AND SUBSTRATE DEVELOPING METHOD
- Publication number 20140261571
- Publication date Sep 18, 2014
- SOKUDO CO., LTD.
- Tomohiro GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS AND HEAT TREATMENT APPARATUS
- Publication number 20090060686
- Publication date Mar 5, 2009
- Sokudo Co., Ltd.
- Akihiko Morita
- H01 - BASIC ELECTRIC ELEMENTS