Akihiko Ogawa

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate polishing system, substrate polishing method and substrat...
- Patent number 11,633,828
- Issue date Apr 25, 2023
- Ebara Corporation
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Grant
Method of semiconductor manufacturing apparatus and non-transitory...
- Patent number 10,890,899
- Issue date Jan 12, 2021
- Ebara Corporation
- Ryuichiro Mitani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 10,625,390
- Issue date Apr 21, 2020
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing monitoring method, polishing apparatus and monitoring app...
- Patent number 9,068,814
- Issue date Jun 30, 2015
- Ebara Corporation
- Taro Takahashi
- G01 - MEASURING TESTING
Information Patent Grant
Polishing method and apparatus
- Patent number 8,454,407
- Issue date Jun 4, 2013
- Ebara Corporation
- Taro Takahashi
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing monitoring method and polishing apparatus
- Patent number 8,078,419
- Issue date Dec 13, 2011
- Ebara Corporation
- Yoichi Kobayashi
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING SYSTEM, SUBSTRATE POLISHING METHOD AND SUBSTRAT...
- Publication number 20200269380
- Publication date Aug 27, 2020
- EBARA CORPORATION
- Yuta Suzuki
- B24 - GRINDING POLISHING
Information Patent Application
DESIGN METHOD OF SEMICONDUCTOR MANUFACTURING APPARATUS AND NON-TRAN...
- Publication number 20190171193
- Publication date Jun 6, 2019
- EBARA CORPORATION
- Ryuichiro MITANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20180147687
- Publication date May 31, 2018
- EBARA CORPORATION
- Taro TAKAHASHI
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND APPARATUS
- Publication number 20100035516
- Publication date Feb 11, 2010
- Taro TAKAHASHI
- B24 - GRINDING POLISHING
Information Patent Application
Polishing monitoring method and polishing apparatus
- Publication number 20090104847
- Publication date Apr 23, 2009
- Yoichi Kobayashi
- B24 - GRINDING POLISHING
Information Patent Application
Polishing monitoring method, polishing apparatus and monitoring app...
- Publication number 20090096446
- Publication date Apr 16, 2009
- Taro Takahashi
- G01 - MEASURING TESTING