Akihiko Seki

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Joetsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Positive resist composition and patterning process
- Patent number 9,778,568
- Issue date Oct 3, 2017
- Shin-Etsu Chemical Co., Ltd.
- Kenji Funatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
POSTITIVE RESIST COMPOSTION AND PATTERNING PROCESS
- Publication number 20160327864
- Publication date Nov 10, 2016
- Shin-Etsu Chemical Co., Ltd.
- Kenji Funatsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY