Akihiko TAKI

Person

Kyoto-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device, substrate processing method, and subst...
- Patent number 11,195,731
- Issue date Dec 7, 2021
- SCREEN Holdings Co., Ltd.
- Masafumi Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,031,235
- Issue date Jun 8, 2021
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,777,404
- Issue date Sep 15, 2020
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing device
- Patent number 10,720,320
- Issue date Jul 21, 2020
- SCREEN Holdings Co., Ltd.
- Tetsuya Emoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,199,243
- Issue date Feb 5, 2019
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding/rotating device, substrate processing apparatus i...
- Patent number 10,192,771
- Issue date Jan 29, 2019
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- B08 - CLEANING
Information Patent Grant
Substrate holding/rotating device, substrate processing apparatus i...
- Patent number 9,892,955
- Issue date Feb 13, 2018
- SCREEN Holdings Co., Ltd.
- Hiromichi Kaba
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230031209
- Publication date Feb 2, 2023
- SCREEN Holdings Co., Ltd.
- Tatsuhiro SUZUKI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200381244
- Publication date Dec 3, 2020
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE
- Publication number 20180269056
- Publication date Sep 20, 2018
- SCREEN Holdings Co., Ltd.
- Tetsuya EMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SUBST...
- Publication number 20180182649
- Publication date Jun 28, 2018
- SCREEN Holdings Co., Ltd.
- Masafumi INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180158698
- Publication date Jun 7, 2018
- SCREEN Holdings Co., Ltd.
- Kazuhiro Fujita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20170243735
- Publication date Aug 24, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...
- Publication number 20170092530
- Publication date Mar 30, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...
- Publication number 20170092532
- Publication date Mar 30, 2017
- SCREEN Holdings Co., Ltd.
- Hiromichi KABA
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130014787
- Publication date Jan 17, 2013
- Shingo URATA
- H01 - BASIC ELECTRIC ELEMENTS

Akihiko TAKI

Person

Patents Grantslast 30 patents

Substrate processing device, substrate processing method, and subst...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing method and substrate processing device

Substrate processing method and substrate processing apparatus

Substrate holding/rotating device, substrate processing apparatus i...

Substrate holding/rotating device, substrate processing apparatus i...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING DEVICE

SUBSTRATE PROCESSING DEVICE, SUBSTRATE PROCESSING METHOD, AND SUBST...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...

SUBSTRATE HOLDING/ROTATING DEVICE, SUBSTRATE PROCESSING APPARATUS I...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD