Akihiko Tashiro

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for forming metal film
- Patent number 7,498,261
- Issue date Mar 3, 2009
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method
- Patent number 7,407,821
- Issue date Aug 5, 2008
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,374,584
- Issue date May 20, 2008
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing substrate
- Patent number 7,285,492
- Issue date Oct 23, 2007
- Ebara Corporation
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Interconnects forming method and interconnects forming apparatus
- Patent number 7,217,653
- Issue date May 15, 2007
- Ebara Corporation
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20100105154
- Publication date Apr 29, 2010
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...
- Publication number 20100075498
- Publication date Mar 25, 2010
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and apparatus
- Publication number 20090000549
- Publication date Jan 1, 2009
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device and Method for Manufacturing the Same, and Pro...
- Publication number 20080067679
- Publication date Mar 20, 2008
- Daisuke Takagi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20080000776
- Publication date Jan 3, 2008
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20070228569
- Publication date Oct 4, 2007
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for forming metal film
- Publication number 20060057839
- Publication date Mar 16, 2006
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for processing substrate
- Publication number 20050245080
- Publication date Nov 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Interconnects forming method and interconnects forming apparatus
- Publication number 20050064702
- Publication date Mar 24, 2005
- Xinming Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20050022909
- Publication date Feb 3, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing method and apparatus
- Publication number 20050009213
- Publication date Jan 13, 2005
- Xinming Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for forming capping film
- Publication number 20050009340
- Publication date Jan 13, 2005
- Yasuhiko Saijo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akihiko Tashiro

Person

Patents Grantslast 30 patents

Method and apparatus for forming metal film

Substrate processing method

Interconnects forming method and interconnects forming apparatus

Method for processing substrate

Interconnects forming method and interconnects forming apparatus

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR PROCESSING SUBSTRATE

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND PRO...

Substrate processing method and apparatus

Semiconductor Device and Method for Manufacturing the Same, and Pro...

Method and apparatus for processing substrate

Interconnects forming method and interconnects forming apparatus

Method and apparatus for forming metal film

Method and apparatus for processing substrate

Interconnects forming method and interconnects forming apparatus

Substrate processing method and substrate processing apparatus

Substrate processing method and apparatus

Method and apparatus for forming capping film