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Akihiko Tsukada

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  • Sagamihara-Shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Processing device and method of maintaining the device
    • Patent number 7,367,350
    • Issue date May 6, 2008
    • Tokyo Electron Limited
    • Daisuke Toriya
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    MOCVD system
    • Patent number 6,319,327
    • Issue date Nov 20, 2001
    • Tokyo Electron Limited
    • Akihiko Tsukada
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents