TREA

Akihiko Tsukada

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  • Isehara, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Heat treatment apparatus
    • Patent number 6,042,372
    • Issue date Mar 28, 2000
    • Tokyo Electron Limited
    • Kazunari Sakata
    • C30 - CRYSTAL GROWTH
  • Information Patent Grant

    Vertical heat treatment apparatus
    • Patent number 5,951,282
    • Issue date Sep 14, 1999
    • Tokyo Electron Limited
    • Kazunari Sakata
    • H01 - BASIC ELECTRIC ELEMENTS