Akihiko Yoneda

Person

Toyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing apparatus
- Patent number 10,903,098
- Issue date Jan 26, 2021
- Kokusai Electric Corporation
- Akihiko Yoneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 10,295,991
- Issue date May 21, 2019
- Kokusai Electric Corporation
- Akihiko Yoneda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus, maintenance method, and maintenance...
- Patent number 10,290,516
- Issue date May 14, 2019
- KOKUSAI ELECTRIC CORPOATION
- Akihiko Yoneda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,600,539
- Issue date Dec 3, 2013
- Hitachi Kokusai Electric Inc.
- Akihiko Yoneda
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 8,482,426
- Issue date Jul 9, 2013
- Hitachi Kokusai Electric Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,808,396
- Issue date Oct 5, 2010
- Hitachi Kokusai Electric, Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Manufacturing method of semiconductor device, and substrate process...
- Patent number 7,494,941
- Issue date Feb 24, 2009
- Hitachi Kokusai Electric Inc.
- Osamu Kasahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200043763
- Publication date Feb 6, 2020
- Kokusai Electric Corporation
- Akihiko YONEDA
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM
- Publication number 20180024536
- Publication date Jan 25, 2018
- Hitachi Kokusai Electric Inc.
- Akihiko Yoneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE...
- Publication number 20130253689
- Publication date Sep 26, 2013
- Hitachi Kokusai Electric Inc.
- Akihiko YONEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate processing apparatus
- Publication number 20110167374
- Publication date Jul 7, 2011
- Hitachi Kokusai Electric Inc.
- Akihiko Yoneda
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus
- Publication number 20110012745
- Publication date Jan 20, 2011
- Hitachi Kokusai Electric Inc.
- Tsukasa Ilda
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus
- Publication number 20090114150
- Publication date May 7, 2009
- Hitachi Kokusai Electric Inc.
- Akihiko Yoneda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus
- Publication number 20090072990
- Publication date Mar 19, 2009
- Hitachi Kokusai Electric Inc.
- Tsukasa Iida
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate Processing Apparatus
- Publication number 20090018692
- Publication date Jan 15, 2009
- Hitachi Kokusai Electric Inc.
- Akihiko Yoneda
- G05 - CONTROLLING REGULATING
Information Patent Application
Method for manufacturing semiconductor device and substrate process...
- Publication number 20070032045
- Publication date Feb 8, 2007
- Hitachi Kokusai Electric Inc.
- Osamu Kasahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akihiko Yoneda

Person

Patents Grantslast 30 patents

Substrate processing system and substrate processing apparatus

Substrate processing apparatus and recording medium

Substrate processing apparatus, maintenance method, and maintenance...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Manufacturing method of semiconductor device, and substrate process...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND RECORDING MEDIUM

SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD, AND MAINTENANCE...

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate Processing Apparatus

Method for manufacturing semiconductor device and substrate process...