Akihiro Egami

Person

Ebina-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Thin film forming apparatus, thin film forming method, and shield c...
- Patent number 9,194,038
- Issue date Nov 24, 2015
- Canon Anelva Corporation
- Akihiro Egami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Annealing method for semiconductor device with silicon carbide subs...
- Patent number 8,198,182
- Issue date Jun 12, 2012
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating process apparatus
- Patent number 8,150,243
- Issue date Apr 3, 2012
- Canon Anelva Corporation
- Akira Kumagai
- G01 - MEASURING TESTING
Information Patent Grant
Surface processing apparatus
- Patent number 8,007,633
- Issue date Aug 30, 2011
- Canon Anelva Corporation
- Akihiro Egami
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate heating apparatus, heating method, and semiconductor devi...
- Patent number 7,897,523
- Issue date Mar 1, 2011
- Canon Anelva Engineering Corporation
- Masami Shibagaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate heating apparatus and semiconductor fabrication method
- Patent number 7,807,553
- Issue date Oct 5, 2010
- Canon Anelva Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Surface processing apparatus
- Publication number 20110174221
- Publication date Jul 21, 2011
- CANON ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILM FORMING APPARATUS, THIN FILM FORMING METHOD, AND SHIELD C...
- Publication number 20110155059
- Publication date Jun 30, 2011
- Canon ANELVA Corporation
- Akihiro Egami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...
- Publication number 20110121317
- Publication date May 26, 2011
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATING PROCESS APPARATUS
- Publication number 20100111512
- Publication date May 6, 2010
- Canon ANELVA Corporation
- Akira Kumagai
- G01 - MEASURING TESTING
Information Patent Application
ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...
- Publication number 20100025695
- Publication date Feb 4, 2010
- CANON ANELVA CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING APPARATUS AND SUBSTRATE HEATING METHOD
- Publication number 20100006560
- Publication date Jan 14, 2010
- Canon ANELVA Corporation
- Akihiro EGAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Heating Apparatus, Heating Method, and Semiconductor Devi...
- Publication number 20090191724
- Publication date Jul 30, 2009
- CANON ANELVA ENGINEERING CORPORATION
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD
- Publication number 20080213988
- Publication date Sep 4, 2008
- Canon ANELVA Corporation
- Masami Shibagaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface processing apparatus
- Publication number 20080113149
- Publication date May 15, 2008
- ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface processing apparatus
- Publication number 20030024478
- Publication date Feb 6, 2003
- ANELVA CORPORATION
- Akihiro Egami
- H01 - BASIC ELECTRIC ELEMENTS

Akihiro Egami

Person

Patents Grantslast 30 patents

Thin film forming apparatus, thin film forming method, and shield c...

Annealing method for semiconductor device with silicon carbide subs...

Heating process apparatus

Surface processing apparatus

Substrate heating apparatus, heating method, and semiconductor devi...

Substrate heating apparatus and semiconductor fabrication method

Patents Applicationslast 30 patents

Surface processing apparatus

THIN FILM FORMING APPARATUS, THIN FILM FORMING METHOD, AND SHIELD C...

ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...

HEATING PROCESS APPARATUS

ANNEALING METHOD FOR SEMICONDUCTOR DEVICE WITH SILICON CARBIDE SUBS...

SUBSTRATE HEATING APPARATUS AND SUBSTRATE HEATING METHOD

Substrate Heating Apparatus, Heating Method, and Semiconductor Devi...

SUBSTRATE HEATING APPARATUS AND SEMICONDUCTOR FABRICATION METHOD

Surface processing apparatus

Surface processing apparatus