Akihiro HOSOKAWA

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Kyoto-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 8,206,548
- Issue date Jun 26, 2012
- Dainippon Screen Mfg. Co., Ltd.
- Itsuki Kajino
- B08 - CLEANING
Information Patent Grant
Photoirradiation thermal processing apparatus and thermal processin...
- Patent number 7,062,161
- Issue date Jun 13, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing apparatus and thermal processing method
- Patent number 7,041,939
- Issue date May 9, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hosokawa
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Thermal processing method and thermal processing apparatus for subs...
- Patent number 6,936,797
- Issue date Aug 30, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hosokawa
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE
- Publication number 20130056037
- Publication date Mar 7, 2013
- Kozo TERASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20090239384
- Publication date Sep 24, 2009
- Kunio Fujiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20080237188
- Publication date Oct 2, 2008
- Itsuki Kajino
- B08 - CLEANING
Information Patent Application
Thermal processing apparatus and thermal processing method
- Publication number 20050115947
- Publication date Jun 2, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photoirradiation thermal processing apparatus and thermal processin...
- Publication number 20040105670
- Publication date Jun 3, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Tatsufumi Kusuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thermal processing method and thermal processing apparatus for subs...
- Publication number 20030235972
- Publication date Dec 25, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Akihiro Hosokawa
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING