Akihiro Kawai

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Kobe, JP

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Patents Grantslast 30 patents

Information Patent Grant
Regeneration method and apparatus of wafer and substrate
- Patent number 5,981,301
- Issue date Nov 9, 1999
- Kabushiki Kaisha Kobe Seiko Sho
- Kazuo Muramatsu
- B24 - GRINDING POLISHING