Akihiro KIKUCHI

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of cleaning substrate processing apparatus
- Patent number 9,925,571
- Issue date Mar 27, 2018
- Tokyo Electron Limited
- Akihiro Kikuchi
- B08 - CLEANING
Information Patent Grant
Plasma processor and plasma processing method
- Patent number 9,728,381
- Issue date Aug 8, 2017
- Tokyo Electron Limited
- Akihiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processor and plasma processing method
- Patent number 9,437,402
- Issue date Sep 6, 2016
- Tokyo Electron Limited
- Akihiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processor and plasma processing method
- Patent number 8,904,957
- Issue date Dec 9, 2014
- Tokyo Electron Limited
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processor and plasma processing method
- Patent number 8,387,562
- Issue date Mar 5, 2013
- Tokyo Electron Limited
- Akihiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device fabricating method, plasma processing system a...
- Patent number 8,263,498
- Issue date Sep 11, 2012
- Tokyo Electron Limited
- Ryukichi Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma procesor and plasma processing method
- Patent number 8,056,503
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Akihiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etching method, plasma processing apparatus, control program...
- Patent number 7,794,617
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching method and apparatus, control program and computer-r...
- Patent number 7,700,492
- Issue date Apr 20, 2010
- Tokyo Electron Limited
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method, program, computer readable storage medium and plasm...
- Patent number 7,655,570
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microlens forming method
- Patent number 7,303,690
- Issue date Dec 4, 2007
- Tokyo Electron Limited
- Hiroki Amemiya
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
- Publication number 20150083332
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Akihiro KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
- Publication number 20150083333
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Akihiro KIKUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150007857
- Publication date Jan 8, 2015
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- B08 - CLEANING
Information Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
- Publication number 20130174983
- Publication date Jul 11, 2013
- TOKYO ELECTRON LIMITED
- Akihiro KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSOR AND PLASMA PROCESSING METHOD
- Publication number 20120006492
- Publication date Jan 12, 2012
- TOKYO ELECTRON LIMITED
- Akihiro KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND STORAGE MEDIUM
- Publication number 20090029557
- Publication date Jan 29, 2009
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING METHOD, PLASMA PROCESSING APPARATUS, CONTROL PROGRAM...
- Publication number 20070287297
- Publication date Dec 13, 2007
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma etching method and apparatus, control program and computer-r...
- Publication number 20060289385
- Publication date Dec 28, 2006
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Etching method, program, computer readable storage medium and plasm...
- Publication number 20060154472
- Publication date Jul 13, 2006
- TOKYO ELECTRON LIMITED
- Akihiro Kikuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microlens forming method
- Publication number 20060043068
- Publication date Mar 2, 2006
- TOKYO ELECTRON LIMITED
- Hiroki Amemiya
- G02 - OPTICS
Information Patent Application
Plasma procesor and plasma processing method
- Publication number 20040177927
- Publication date Sep 16, 2004
- Akihiro Kikuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akihiro KIKUCHI

Person

Patents Grantslast 30 patents

Method of cleaning substrate processing apparatus

Plasma processor and plasma processing method

Plasma processor and plasma processing method

Plasma processor and plasma processing method

Plasma processor and plasma processing method

Semiconductor device fabricating method, plasma processing system a...

Plasma procesor and plasma processing method

Plasma etching method, plasma processing apparatus, control program...

Plasma etching method and apparatus, control program and computer-r...

Etching method, program, computer readable storage medium and plasm...

Microlens forming method

Patents Applicationslast 30 patents

PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

PLASMA PROCESSOR AND PLASMA PROCESSING METHOD

PLASMA ETCHING METHOD, PLASMA ETCHING APPARATUS AND STORAGE MEDIUM

PLASMA ETCHING METHOD, PLASMA PROCESSING APPARATUS, CONTROL PROGRAM...

Plasma etching method and apparatus, control program and computer-r...

Etching method, program, computer readable storage medium and plasm...

Microlens forming method

Plasma procesor and plasma processing method