Akihiro Kubo

Person

Koshi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 11,554,389
- Issue date Jan 17, 2023
- Tokyo Electron Limited
- Akihiro Kubo
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,532,487
- Issue date Dec 20, 2022
- Tokyo Electron Limited
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dressing apparatus and dressing method for substrate rear surface p...
- Patent number 11,059,145
- Issue date Jul 13, 2021
- Tokyo Electron Limited
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method and sto...
- Patent number 10,840,079
- Issue date Nov 17, 2020
- Tokyo Electron Limited
- Yasushi Takiguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 10,328,546
- Issue date Jun 25, 2019
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,074,542
- Issue date Sep 11, 2018
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing cleaning mechanism, substrate processing apparatus, and s...
- Patent number 9,669,510
- Issue date Jun 6, 2017
- Tokyo Electron Limited
- Akihiro Kubo
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate liquid treatment apparatus and substrate liquid treatment...
- Patent number 9,570,327
- Issue date Feb 14, 2017
- Tokyo Electron Limited
- Masahiro Fukuda
- B08 - CLEANING
Information Patent Grant
Heat treatment apparatus, heat treatment method, and recording medi...
- Patent number 7,947,926
- Issue date May 24, 2011
- Tokyo Electron Limited
- Katsuhisa Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...
- Publication number 20240139780
- Publication date May 2, 2024
- TOKYO ELECTRON LIMITED
- Kento KURUSU
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20230381825
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20210308828
- Publication date Oct 7, 2021
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20210220878
- Publication date Jul 22, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...
- Publication number 20210039221
- Publication date Feb 11, 2021
- Tokyo Electron Limited
- Nozomu KANETAKE
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20200365417
- Publication date Nov 19, 2020
- TOKYO ELECTRON LIMITED
- Akihiro Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...
- Publication number 20190047118
- Publication date Feb 14, 2019
- TOKYO ELECTRON LIMITED
- Yoshiki Okamoto
- B24 - GRINDING POLISHING
Information Patent Application
Substrate Processing Apparatus, Substrate Processing Method and Sto...
- Publication number 20180151343
- Publication date May 31, 2018
- TOKYO ELECTRON LIMITED
- Yasushi TAKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...
- Publication number 20170225289
- Publication date Aug 10, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170092504
- Publication date Mar 30, 2017
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...
- Publication number 20150318193
- Publication date Nov 5, 2015
- Tokyo Electron Limited
- Masahiro FUKUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...
- Publication number 20150133032
- Publication date May 14, 2015
- TOKYO ELECTRON LIMITED
- Akihiro KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...
- Publication number 20070286709
- Publication date Dec 13, 2007
- TOKYO ELECTRON LIMITED
- Katsuhisa FUJII
- H01 - BASIC ELECTRIC ELEMENTS

Akihiro Kubo

Person

Patents Grantslast 30 patents

Substrate cleaning apparatus and substrate cleaning method

Substrate processing apparatus

Dressing apparatus and dressing method for substrate rear surface p...

Substrate processing apparatus, substrate processing method and sto...

Polishing cleaning mechanism, substrate processing apparatus, and s...

Substrate processing method and substrate processing apparatus

Polishing cleaning mechanism, substrate processing apparatus, and s...

Substrate liquid treatment apparatus and substrate liquid treatment...

Heat treatment apparatus, heat treatment method, and recording medi...

Patents Applicationslast 30 patents

SUBSTRATE CLEANING MEMBER, SUBSTRATE PROCESSING APPARATUS AND SUBST...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD

SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND S...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

DRESSING APPARATUS AND DRESSING METHOD FOR SUBSTRATE REAR SURFACE P...

Substrate Processing Apparatus, Substrate Processing Method and Sto...

POLISHING CLEANING MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND S...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE LIQUID TREATMENT APPARATUS AND SUBSTRATE LIQUID TREATMENT...

Polishing Cleaning Mechanism, Substrate Processing Apparatus, and S...

HEAT TREATMENT APPARATUS, HEAT TREATMENT METHOD, AND RECORDING MEDI...