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Akihiro KURIBAYASHI

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CLEANING METHOD AND FILM DEPOSITION APPARATUS
    • Publication number 20230175125
    • Publication date Jun 8, 2023
    • TOKYO ELECTRON LIMITED
    • Hideomi HANE
    • B08 - CLEANING
  • Information Patent Application

    CLEANING METHOD OF DEPOSITION APPARATUS
    • Publication number 20200299835
    • Publication date Sep 24, 2020
    • TOKYO ELECTRON LIMITED
    • Jun OGAWA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20200294787
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20180135170
    • Publication date May 17, 2018
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Method and Film Forming Apparatus
    • Publication number 20170271143
    • Publication date Sep 21, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF FORMING NITRIDE FILM
    • Publication number 20170218517
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Film Forming Methd and Film Forming Apparatus
    • Publication number 20170221703
    • Publication date Aug 3, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20170186606
    • Publication date Jun 29, 2017
    • TOKYO ELECTRON LIMITED
    • Noriaki FUKIAGE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...