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Akihiro Kuribayashi

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  • Nagano-shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    ELECTROSTATIC CHUCK AND SUBSTRATE FIXING DEVICE
    • Publication number 20210242065
    • Publication date Aug 5, 2021
    • Shinko Electric Industries Co., Ltd.
    • Hiroyuki Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE FIXING DEVICE
    • Publication number 20210243845
    • Publication date Aug 5, 2021
    • Shinko Electric Industries Co., Ltd.
    • Akihiro Kuribayashi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    TEMPERATURE ADJUSTMENT DEVICE
    • Publication number 20150270149
    • Publication date Sep 24, 2015
    • Shinko Electric Industries Co., LTD.
    • Akihiro Kuribayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK
    • Publication number 20130321974
    • Publication date Dec 5, 2013
    • Shinko Electric Industries Co., LTD.
    • Akihiro Kuribayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE TEMPERATURE ADJUSTING-FIXING DEVICE AND MANUFACTURING MET...
    • Publication number 20130148253
    • Publication date Jun 13, 2013
    • Shinko Electric Industries Co., Ltd.
    • Hidehiro KOMATSU
    • H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20110096460
    • Publication date Apr 28, 2011
    • Shinko Electric Industries Co., Ltd.
    • Hiroshi YONEKURA
    • H01 - BASIC ELECTRIC ELEMENTS