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Akihiro Naganawa
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Akita-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Planar positioning device and inspection device provided with the same
Patent number
8,495,761
Issue date
Jul 23, 2013
Akita Prefecture
Yotsugi Shibuya
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
PLANAR POSITIONING DEVICE AND INSPECTION DEVICE PROVIDED WITH THE SAME
Publication number
20110321203
Publication date
Dec 29, 2011
AKITA PREFECTURE, a government agency of Japan
Yotsugi Shibuya
G01 - MEASURING TESTING