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Akihiro NAKAMURA
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Koshi City, JP
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Patents Grants
last 30 patents
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Patent Grant
Flow-rate regulator device, diluted chemical-liquid supply device,...
Patent number
10,276,408
Issue date
Apr 30, 2019
Tokyo Electron Limited
Michitaka Amiya
G05 - CONTROLLING REGULATING
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last 30 patents
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Patent Application
FLOW-RATE REGULATOR DEVICE, DILUTED CHEMICAL-LIQUID SUPPLY DEVICE,...
Publication number
20150380280
Publication date
Dec 31, 2015
TOKYO ELECTRON LIMITED
Michitaka AMIYA
B08 - CLEANING