Akihiro Nakashima

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,569,104
- Issue date Jan 31, 2023
- SCREEN Holdings Co., Ltd.
- Takashi Ota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,403,517
- Issue date Sep 3, 2019
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,793,176
- Issue date Oct 17, 2017
- SCREEN Holdings Co., Ltd.
- Kenji Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210028032
- Publication date Jan 28, 2021
- SCREEN Holdings Co., Ltd.
- Takashi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20160372341
- Publication date Dec 22, 2016
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATER ABNORMALITY DETECTING APPARATUS, PROCESSING LIQUID SUPPLYING...
- Publication number 20160251754
- Publication date Sep 1, 2016
- SCREEN Holdings Co., Ltd.
- Akihiro NAKASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160240399
- Publication date Aug 18, 2016
- SCREEN Holdings Co., Ltd.
- Kenji KOBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS