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Akihiro Onizawa
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Mito, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Pattern measurement device, and computer program for measuring pattern
Patent number
10,545,018
Issue date
Jan 28, 2020
Hitachi High-Technologies Corporation
Satoru Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Global alignment using multiple alignment pattern candidates
Patent number
9,057,873
Issue date
Jun 16, 2015
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G02 - OPTICS
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Patent Grant
Pattern measurement apparatus
Patent number
8,445,871
Issue date
May 21, 2013
Hitachi High-Technologies Corporation
Ryoichi Matsuoka
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Pattern measurement apparatus
Patent number
7,732,792
Issue date
Jun 8, 2010
Hitachi High-Technologies Corporation
Ryoichi Matsuoka
G06 - COMPUTING CALCULATING COUNTING
Patents Applications
last 30 patents
Information
Patent Application
Pattern Measurement Device, and Computer Program for Measuring Pattern
Publication number
20160320182
Publication date
Nov 3, 2016
Hitachi High-Technologies Corporation
Satoru YAMAGUCHI
G01 - MEASURING TESTING
Information
Patent Application
PATTERN EVALUATION DEVICE AND PATTERN EVALUATION METHOD
Publication number
20150146967
Publication date
May 28, 2015
Hitachi High-Technologies Corporation
Atsushi Miyamoto
G02 - OPTICS
Information
Patent Application
GLOBAL ALIGNMENT USING MULTIPLE ALIGNMENT PATTERN CANDIDATES
Publication number
20130234019
Publication date
Sep 12, 2013
Atsushi Miyamoto
G02 - OPTICS
Information
Patent Application
PATTERN MEASUREMENT APPARATUS
Publication number
20100202654
Publication date
Aug 12, 2010
Hitachi High-Technologies Corporation
Ryoichi MATSUOKA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PATTERN MEASUREMENT APPARATUS
Publication number
20090039263
Publication date
Feb 12, 2009
Ryoichi MATSUOKA
G06 - COMPUTING CALCULATING COUNTING