Akihiro TAKAYAMA

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Oyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Extreme ultraviolet light generating apparatus and method of manufa...
- Patent number 10,959,317
- Issue date Mar 23, 2021
- Gigaphoton Inc.
- Akihiro Takayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,716,198
- Issue date Jul 14, 2020
- Gigaphoton Inc.
- Akihiro Takayama
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Extreme ultraviolet light generation apparatus
- Patent number 10,582,602
- Issue date Mar 3, 2020
- Gigaphoton Inc.
- Atsushi Ueda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generating apparatus
- Patent number 10,374,381
- Issue date Aug 6, 2019
- Gigaphoton Inc.
- Toru Suzuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS AND METHOD OF MANUFA...
- Publication number 20210076478
- Publication date Mar 11, 2021
- Gigaphoton Inc.
- Akihiro TAKAYAMA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20190364654
- Publication date Nov 28, 2019
- Gigaphoton Inc.
- Atsushi UEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS
- Publication number 20190320521
- Publication date Oct 17, 2019
- Gigaphoton Inc.
- Akihiro TAKAYAMA
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS
- Publication number 20170250517
- Publication date Aug 31, 2017
- Gigaphoton Inc.
- Toru SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS