Akihiro TERAMOTO

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Liquid amount measuring method and computer-readable recording medium
- Patent number 12,174,549
- Issue date Dec 24, 2024
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Solution treatment apparatus and cleaning method
- Patent number 11,868,057
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kenta Shibasaki
- B08 - CLEANING
Information Patent Grant
Substrate processing system, liquid amount measuring method, comput...
- Patent number 11,726,409
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Yuichiro Kunugimoto
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus and substrate receptacle storage method
- Patent number 11,476,143
- Issue date Oct 18, 2022
- Tokyo Electron Limited
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,211,278
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device, substrate transfer method and recording...
- Patent number 10,879,100
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Tokutarou Hayashi
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,268,327
- Issue date Feb 23, 2016
- Tokyo Electron Limited
- Akihiro Teramoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer device, substrate transfer method, and storage m...
- Patent number 9,214,370
- Issue date Dec 15, 2015
- Tokyo Electron Limited
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and non...
- Patent number 9,136,150
- Issue date Sep 15, 2015
- Tokyo Electron Limited
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus
- Patent number 8,043,039
- Issue date Oct 25, 2011
- Tokyo Electron Limited
- Yuichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20240249964
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Shinsuke TAKAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM
- Publication number 20240120867
- Publication date Apr 11, 2024
- TOKYO ELECTRON LIMITED
- Youichi MASAKI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20240085813
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM
- Publication number 20230418166
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20230282493
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Keita HIRASE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...
- Publication number 20220171294
- Publication date Jun 2, 2022
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- B08 - CLEANING
Information Patent Application
SOLUTION TREATMENT APPARATUS AND CLEANING METHOD
- Publication number 20220113643
- Publication date Apr 14, 2022
- TOKYO ELECTRON LIMITED
- Kenta SHIBASAKI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD
- Publication number 20210134636
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Akihiro Teramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus and Substrate Processing Method
- Publication number 20200126823
- Publication date Apr 23, 2020
- TOKYO ELECTRON LIMITED
- Akihiro TERAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...
- Publication number 20180240695
- Publication date Aug 23, 2018
- TOKYO ELECTRON LIMITED
- Tokutarou Hayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD, AND STORAGE M...
- Publication number 20130272824
- Publication date Oct 17, 2013
- TOKYO ELECTRON LIMITED
- Naruaki Iida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130211571
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Akihiro TERAMOTO
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...
- Publication number 20130202388
- Publication date Aug 8, 2013
- TOKYO ELECTRON LIMITED
- Tokutarou HAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS
- Publication number 20090081009
- Publication date Mar 26, 2009
- TOKYO ELECTRON LIMITED
- Yuichi Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS

Akihiro TERAMOTO

Person

Patents Grantslast 30 patents

Liquid amount measuring method and computer-readable recording medium

Solution treatment apparatus and cleaning method

Substrate processing system, liquid amount measuring method, comput...

Substrate processing apparatus and substrate receptacle storage method

Substrate processing apparatus and substrate processing method

Substrate transfer device, substrate transfer method and recording...

Substrate processing apparatus and substrate processing method

Substrate transfer device, substrate transfer method, and storage m...

Substrate processing apparatus, substrate processing method and non...

Substrate treatment apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

MOTOR CONTROL METHOD, TRANSFER DEVICE, AND STORING MEDIUM

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

LIQUID AMOUNT MEASURING METHOD AND COMPUTER-READABLE RECORDING MEDIUM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM, LIQUID AMOUNT MEASURING METHOD, AND CO...

SOLUTION TREATMENT APPARATUS AND CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE RECEPTACLE STORAGE METHOD

Substrate Processing Apparatus and Substrate Processing Method

SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD AND RECORDING...

SUBSTRATE TRANSFER DEVICE, SUBSTRATE TRANSFER METHOD, AND STORAGE M...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND NON...

SUBSTRATE TREATMENT APPARATUS