Akihiro Toyozawa

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Koshi City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate heat treatment device
- Patent number 9,463,938
- Issue date Oct 11, 2016
- Tokyo Electron Limited
- Akihiro Toyozawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
- Publication number 20230253219
- Publication date Aug 10, 2023
- TOKYO ELECTRON LIMITED
- Yuichiro KUNUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND S...
- Publication number 20150228512
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Makoto Muramatsu
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE HEAT TREATMENT DEVICE
- Publication number 20130052599
- Publication date Feb 28, 2013
- TOKYO ELECTRON LIMITED
- Akihiro Toyozawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL