Akihiro Yamada

Person

Utsunomiya-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Measurement apparatus, system, measurement method, determination me...
- Patent number 10,068,350
- Issue date Sep 4, 2018
- Canon Kabushiki Kaisha
- Akihiro Yamada
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Multi-wavelength interferometer, measurement apparatus, and measure...
- Patent number 9,062,957
- Issue date Jun 23, 2015
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Grant
Projection optical system with deformable optical element, exposure...
- Patent number 8,786,822
- Issue date Jul 22, 2014
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Grant
Exposure apparatus
- Patent number 7,602,474
- Issue date Oct 13, 2009
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method, and device manufacturing method usin...
- Patent number 7,525,639
- Issue date Apr 28, 2009
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus, and device fabricati...
- Patent number 7,474,380
- Issue date Jan 6, 2009
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and method
- Patent number 7,060,994
- Issue date Jun 13, 2006
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection optical system, exposure apparatus and device fabricatio...
- Patent number 7,057,708
- Issue date Jun 6, 2006
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
THREE-DIMENSIONAL MEASUREMENT APPARATUS, SYSTEM, AND PRODUCTION METHOD
- Publication number 20220108464
- Publication date Apr 7, 2022
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT APPARATUS, SYSTEM, MEASUREMENT METHOD, AND ARTICLE MANU...
- Publication number 20170255181
- Publication date Sep 7, 2017
- Canon Kabushiki Kaisha
- Akihiro Yamada
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MEASUREMENT APPARATUS, SYSTEM, MEASUREMENT METHOD, DETERMINATION ME...
- Publication number 20170169581
- Publication date Jun 15, 2017
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MEASUREMENT APPARATUS
- Publication number 20160267668
- Publication date Sep 15, 2016
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION APPARATUS, LITHOGRAPHY APPARATUS, IMPRINT APPARATUS, AND...
- Publication number 20130193603
- Publication date Aug 1, 2013
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...
- Publication number 20130100458
- Publication date Apr 25, 2013
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT APPARATUS
- Publication number 20130088722
- Publication date Apr 11, 2013
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G01 - MEASURING TESTING
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...
- Publication number 20100214546
- Publication date Aug 26, 2010
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090027647
- Publication date Jan 29, 2009
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICATI...
- Publication number 20080212058
- Publication date Sep 4, 2008
- Canon Kabushiki Kaisha
- Akihiro Yamada
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20080123055
- Publication date May 29, 2008
- Canon Kabushiki Kaisha
- Kenichiro Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Akihiro Yamada

Person

Patents Grantslast 30 patents

Measurement apparatus, system, measurement method, determination me...

Multi-wavelength interferometer, measurement apparatus, and measure...

Projection optical system with deformable optical element, exposure...

Exposure apparatus

Exposure apparatus and method, and device manufacturing method usin...

Projection optical system, exposure apparatus, and device fabricati...

Exposure apparatus and method

Projection optical system, exposure apparatus and device fabricatio...

Patents Applicationslast 30 patents

THREE-DIMENSIONAL MEASUREMENT APPARATUS, SYSTEM, AND PRODUCTION METHOD

MEASUREMENT APPARATUS, SYSTEM, MEASUREMENT METHOD, AND ARTICLE MANU...

MEASUREMENT APPARATUS, SYSTEM, MEASUREMENT METHOD, DETERMINATION ME...

MEASUREMENT APPARATUS

INSPECTION APPARATUS, LITHOGRAPHY APPARATUS, IMPRINT APPARATUS, AND...

MULTI-WAVELENGTH INTERFEROMETER, MEASUREMENT APPARATUS, AND MEASURE...

MEASUREMENT APPARATUS

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTU...

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE FABRICATI...

EXPOSURE APPARATUS