Akihiro Yazawa

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate transporter and substrate processing apparatus including...
- Patent number 12,237,194
- Issue date Feb 25, 2025
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing unit, substrate processing apparatus, and polishing method
- Patent number 11,890,716
- Issue date Feb 6, 2024
- Ebara Corporation
- Akihiro Yazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding module, substrate processing apparatus, and subst...
- Patent number 10,593,570
- Issue date Mar 17, 2020
- Ebara Corporation
- Akihiro Yazawa
- B08 - CLEANING
Information Patent Grant
Reversing machine and substrate polishing apparatus
- Patent number 10,525,564
- Issue date Jan 7, 2020
- Ebara Corporation
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Grant
Plating apparatus
- Patent number 10,508,355
- Issue date Dec 17, 2019
- Ebara Corporation
- Akihiro Yazawa
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 10,354,900
- Issue date Jul 16, 2019
- Ebara Corporation
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration apparatus and calibration method
- Patent number 10,071,458
- Issue date Sep 11, 2018
- Ebara Corporation
- Akihiro Yazawa
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and substrate processing method
- Patent number 8,128,458
- Issue date Mar 6, 2012
- Ebara Corporation
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 6,824,613
- Issue date Nov 30, 2004
- Ebara Corporation
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE POLISHING APPARATUS
- Publication number 20250178149
- Publication date Jun 5, 2025
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20240017370
- Publication date Jan 18, 2024
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...
- Publication number 20240001407
- Publication date Jan 4, 2024
- EBARA CORPORATION
- Asagi MATSUGU
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...
- Publication number 20220005716
- Publication date Jan 6, 2022
- EBARA CORPORATION
- Akihiro Yazawa
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD
- Publication number 20210187692
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
PLATING APPARATUS
- Publication number 20180087176
- Publication date Mar 29, 2018
- EBARA CORPORATION
- Akihiro YAZAWA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SUBSTRATE HOLDING MODULE, SUBSTRATE PROCESSING APPARATUS, AND SUBST...
- Publication number 20170236727
- Publication date Aug 17, 2017
- EBARA CORPORATION
- Akihiro Yazawa
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20170178940
- Publication date Jun 22, 2017
- EBARA CORPORATION
- Akihiro Yazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION APPARATUS AND CALIBRATION METHOD
- Publication number 20170151646
- Publication date Jun 1, 2017
- EBARA CORPORATION
- Akihiro YAZAWA
- B24 - GRINDING POLISHING
Information Patent Application
REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS
- Publication number 20170072531
- Publication date Mar 16, 2017
- EBARA CORPORATION
- Kenichi Akazawa
- B08 - CLEANING
Information Patent Application
Polishing apparatus and substrate processing method
- Publication number 20090209175
- Publication date Aug 20, 2009
- Kenichiro Saito
- B24 - GRINDING POLISHING
Information Patent Application
Substrate processing apparatus
- Publication number 20030221612
- Publication date Dec 4, 2003
- Naoki Dai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Akihiro Yazawa

Person

Patents Grantslast 30 patents

Substrate transporter and substrate processing apparatus including...

Polishing unit, substrate processing apparatus, and polishing method

Substrate holding module, substrate processing apparatus, and subst...

Reversing machine and substrate polishing apparatus

Plating apparatus

Substrate transfer apparatus and substrate transfer method

Calibration apparatus and calibration method

Polishing apparatus and substrate processing method

Substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

TRANSFER APPARATUS, CLEANING MODULE, AND SUBSTRATE PROCESSING APPAR...

SUBSTRATE TRANSPORTER AND SUBSTRATE PROCESSING APPARATUS INCLUDING...

POLISHING UNIT, SUBSTRATE PROCESSING APPARATUS, AND POLISHING METHOD

PLATING APPARATUS

SUBSTRATE HOLDING MODULE, SUBSTRATE PROCESSING APPARATUS, AND SUBST...

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

CALIBRATION APPARATUS AND CALIBRATION METHOD

REVERSING MACHINE AND SUBSTRATE POLISHING APPARATUS

Polishing apparatus and substrate processing method

Substrate processing apparatus