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Akihiro YOKOTA

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  • Kurokawa-gun, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma processing method
    • Patent number 11,145,490
    • Issue date Oct 12, 2021
    • Tokyo Electron Limited
    • Akihiro Yokota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,133,157
    • Issue date Sep 28, 2021
    • Tokyo Electron Limited
    • Akihiro Yokota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus and temperature control method
    • Patent number 11,041,241
    • Issue date Jun 22, 2021
    • Tokyo Electron Limited
    • Akihiro Yokota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate processing method and substrate processing apparatus
    • Patent number 10,886,135
    • Issue date Jan 5, 2021
    • Tokyo Electron Limited
    • Shinji Kubota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,763,087
    • Issue date Sep 1, 2020
    • Tokyo Electron Limited
    • Shuichi Takahashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing method
    • Patent number 10,651,012
    • Issue date May 12, 2020
    • Tokyo Electron Limited
    • Akihiro Yokota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing method
    • Patent number 10,546,723
    • Issue date Jan 28, 2020
    • Tokyo Electron Limited
    • Akihiro Yokota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 10,297,428
    • Issue date May 21, 2019
    • Tokyo Electron Limited
    • Akihiro Yokota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma etching method
    • Patent number 9,978,566
    • Issue date May 22, 2018
    • Tokyo Electron Limited
    • Akihiro Yokota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 9,390,943
    • Issue date Jul 12, 2016
    • Tokyo Electron Limited
    • Kazuya Nagaseki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etching method of multilayer film
    • Patent number 8,895,454
    • Issue date Nov 25, 2014
    • Tokyo Electron Limited
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus and shower head
    • Patent number 8,852,387
    • Issue date Oct 7, 2014
    • Tokyo Electron Limited
    • Hachishiro Iizuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • Publication number 20230420228
    • Publication date Dec 28, 2023
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20200126759
    • Publication date Apr 23, 2020
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND TEMPERATURE CONTROL METHOD
    • Publication number 20190376185
    • Publication date Dec 12, 2019
    • TOKYO ELECTRON LIMITED
    • Akihiro Yokota
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190244794
    • Publication date Aug 8, 2019
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190164726
    • Publication date May 30, 2019
    • TOKYO ELECTRON LIMITED
    • Gen TAMAMUSHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • Publication number 20190148155
    • Publication date May 16, 2019
    • TOKYO ELECTRON LIMITED
    • Shinji KUBOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING METHOD
    • Publication number 20190096635
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20190096639
    • Publication date Mar 28, 2019
    • TOKYO ELECTRON LIMITED
    • Shuichi TAKAHASHI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING METHOD
    • Publication number 20170162367
    • Publication date Jun 8, 2017
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA ETCHING METHOD
    • Publication number 20170103877
    • Publication date Apr 13, 2017
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20150332898
    • Publication date Nov 19, 2015
    • TOKYO ELECTRON LIMITED
    • Akihiro YOKOTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ETCHING METHOD OF MULTILAYER FILM
    • Publication number 20150072534
    • Publication date Mar 12, 2015
    • TOKYO ELECTRON LIMITED
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20140346040
    • Publication date Nov 27, 2014
    • Akihiro Yokota
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ETCHING METHOD OF MULTILAYER FILM
    • Publication number 20140206199
    • Publication date Jul 24, 2014
    • Shinji Himori
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20130220547
    • Publication date Aug 29, 2013
    • TOKYO ELECTRON LIMITED
    • Kazuya NAGASEKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA PROCESSING APPARATUS AND SHOWER HEAD
    • Publication number 20110214814
    • Publication date Sep 8, 2011
    • TOKYO ELECTRON LIMITED
    • Hachishiro Iizuka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...