Akihiro Yoshimura

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Supporting member and substrate processing apparatus
- Patent number 10,553,408
- Issue date Feb 4, 2020
- Tokyo Electron Limited
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 10,249,478
- Issue date Apr 2, 2019
- Tokyo Electron Limited
- Nobutaka Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 9,455,125
- Issue date Sep 27, 2016
- Tokyo Electron Limited
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focusing ring
- Patent number D709536
- Issue date Jul 22, 2014
- Tokyo Electron Limited
- Akihiro Yoshimura
- D15 - Machines not elsewhere specified
Information Patent Grant
Thermally conductive sheet and substrate mounting device including...
- Patent number 8,702,903
- Issue date Apr 22, 2014
- Tokyo Electron Limited
- Masaaki Miyagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mounting table of substrate processing apparatus
- Patent number 8,687,343
- Issue date Apr 1, 2014
- Tokyo Electron Limited
- Tetsuji Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for improving heat transfer of a focus ring to a target subs...
- Patent number 7,655,579
- Issue date Feb 2, 2010
- Tokyo Electron Limited
- Masaaki Miyagawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS TREATMENT APPARATUS
- Publication number 20220301821
- Publication date Sep 22, 2022
- TOKYO ELECTRON LIMITED
- Yuji SAEGUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20150228462
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Akihiro Yoshimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20150179415
- Publication date Jun 25, 2015
- TOKYO ELECTRON LIMITED
- Nobutaka SASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20150013938
- Publication date Jan 15, 2015
- TOKYO ELECTRON LIMITED
- Akihiro YOSHIMURA
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20110240224
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Akihiro YOSHIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MOUNTING TABLE OF SUBSTRATE PROCESSING APPARATUS
- Publication number 20110116207
- Publication date May 19, 2011
- TOKYO ELECTRON LIMITED
- Tetsuji SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD, AND BAFFLE PLATE OF THE PLA...
- Publication number 20090206055
- Publication date Aug 20, 2009
- TOKYO ELECTRON LIMITED
- Tetsuji SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMALLY CONDUCTIVE SHEET AND SUBSTRATE MOUNTING DEVICE INCLUDING...
- Publication number 20080239691
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Masaaki MIYAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR IMPROVING HEAT TRANSFER OF A FOCUS RING TO A TARGET SUBS...
- Publication number 20080166894
- Publication date Jul 10, 2008
- TOKYO ELECTRON LIMITED
- Masaaki MIYAGAWA
- H01 - BASIC ELECTRIC ELEMENTS

Akihiro Yoshimura

Person

Patents Grantslast 30 patents

Supporting member and substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Focusing ring

Thermally conductive sheet and substrate mounting device including...

Substrate mounting table of substrate processing apparatus

Method for improving heat transfer of a focus ring to a target subs...

Patents Applicationslast 30 patents

GAS TREATMENT APPARATUS

PLASMA PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE MOUNTING TABLE OF SUBSTRATE PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND METHOD, AND BAFFLE PLATE OF THE PLA...

THERMALLY CONDUCTIVE SHEET AND SUBSTRATE MOUNTING DEVICE INCLUDING...

METHOD FOR IMPROVING HEAT TRANSFER OF A FOCUS RING TO A TARGET SUBS...