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Akihisa Ueno
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Process for selective polishing of metal-filled trenches of integra...
Patent number
6,503,828
Issue date
Jan 7, 2003
LSI Logic Corporation
Ronald J. Nagahara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Process for planarization of metal-filled trenches of integrated ci...
Patent number
6,417,093
Issue date
Jul 9, 2002
LSI Logic Corporation
James J. Xie
H01 - BASIC ELECTRIC ELEMENTS