Akihito ANPO

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number RE47707
- Issue date Nov 5, 2019
- NuFlare Technology, Inc.
- Yasuo Kato
Information Patent Grant
Charged particle beam lithography apparatus, inspection apparatus a...
- Patent number 9,164,044
- Issue date Oct 20, 2015
- NuFlare Technology, Inc.
- Shigehiro Hara
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam writing apparatus and irradiation time apport...
- Patent number 9,141,750
- Issue date Sep 22, 2015
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,006,691
- Issue date Apr 14, 2015
- NuFlare Technolgy, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 8,872,141
- Issue date Oct 28, 2014
- Nuflare Technology, Inc.
- Yasuo Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing method and apparatus therefor
- Patent number 8,755,924
- Issue date Jun 17, 2014
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing apparatus
- Patent number 8,563,952
- Issue date Oct 22, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Charged particle beam pattern forming apparatus and charged particl...
- Patent number 8,502,175
- Issue date Aug 6, 2013
- Nuflare Technology, Inc.
- Noriaki Nakayamada
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam writing method and apparatus therefor
- Patent number 8,471,225
- Issue date Jun 25, 2013
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and control method thereof
- Patent number 8,466,440
- Issue date Jun 18, 2013
- Nuflare Technology, Inc.
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Write error verification method of writing apparatus and creation a...
- Patent number 8,307,314
- Issue date Nov 6, 2012
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing apparatus and proximity effect correc...
- Patent number 8,207,514
- Issue date Jun 26, 2012
- Nuflare Technology, Inc.
- Shigehiro Hara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam drawing method and apparatus
- Patent number 8,188,449
- Issue date May 29, 2012
- Nuflare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Data verification method, charged particle beam writing apparatus,...
- Patent number 7,949,966
- Issue date May 24, 2011
- Nuflare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged particle beam lithography apparatus and charged particle be...
- Patent number 7,750,324
- Issue date Jul 6, 2010
- Nuflare Technology, Inc.
- Susumu Oogi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Writing error verification method of pattern writing apparatus and...
- Patent number 7,698,682
- Issue date Apr 13, 2010
- Nuflare Technology, Inc.
- Akihito Anpo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Creation method and conversion method of charged particle beam writ...
- Patent number 7,592,611
- Issue date Sep 22, 2009
- Nuflare Technology, Inc.
- Jun Kasahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming pattern writing data by using charged particle beam
- Patent number 7,504,645
- Issue date Mar 17, 2009
- Nuflare Technology, Inc.
- Akihito Anpo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND IRRADIATION TIME APPORT...
- Publication number 20140017349
- Publication date Jan 16, 2014
- Jun Yashima
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...
- Publication number 20130264478
- Publication date Oct 10, 2013
- NuFlare Technology, Inc.
- Shigehiro HARA
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20130256519
- Publication date Oct 3, 2013
- NuFlare Technology, Inc.
- Yasuo Kato
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF SAME
- Publication number 20120292537
- Publication date Nov 22, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...
- Publication number 20120292536
- Publication date Nov 22, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...
- Publication number 20120007002
- Publication date Jan 12, 2012
- NuFlare Technology, Inc.
- Noriaki NAKAYAMADA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20120001097
- Publication date Jan 5, 2012
- NuFlare Technology, Inc.
- Jun YASHIMA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...
- Publication number 20110068281
- Publication date Mar 24, 2011
- NuFlare Technology, Inc.
- Shigehiro HARA
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS THEREFOR
- Publication number 20110066271
- Publication date Mar 17, 2011
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS THEREFOR
- Publication number 20110066272
- Publication date Mar 17, 2011
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS
- Publication number 20110012031
- Publication date Jan 20, 2011
- NuFlare Technology, Inc.
- Hayato Shibata
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITE ERROR VERIFICATION METHOD OF WRITING APPARATUS AND CREATION A...
- Publication number 20100306721
- Publication date Dec 2, 2010
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...
- Publication number 20090057575
- Publication date Mar 5, 2009
- NuFlare Technology, Inc.
- Susumu OOGI
- B82 - NANO-TECHNOLOGY
Information Patent Application
DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...
- Publication number 20080221816
- Publication date Sep 11, 2008
- NuFlare Technology, Inc.
- Akihito Anpo
- B82 - NANO-TECHNOLOGY
Information Patent Application
WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...
- Publication number 20080046787
- Publication date Feb 21, 2008
- NuFlare Technology, Inc.
- Akihito ANPO
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM
- Publication number 20070226675
- Publication date Sep 27, 2007
- NuFlare Technology, Inc.
- Akihito ANPO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...
- Publication number 20070053242
- Publication date Mar 8, 2007
- NuFlare Technology, Inc.
- Jun Kasahara
- B82 - NANO-TECHNOLOGY

Akihito ANPO

Person

Patents Grantslast 30 patents

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam lithography apparatus, inspection apparatus a...

Charged particle beam writing apparatus and irradiation time apport...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing apparatus and charged particle beam w...

Charged particle beam writing method and apparatus therefor

Charged particle beam writing apparatus

Charged particle beam pattern forming apparatus and charged particl...

Charged particle beam writing method and apparatus therefor

Charged particle beam drawing apparatus and control method thereof

Write error verification method of writing apparatus and creation a...

Charged particle beam drawing apparatus and proximity effect correc...

Charged particle beam drawing method and apparatus

Data verification method, charged particle beam writing apparatus,...

Charged particle beam lithography apparatus and charged particle be...

Writing error verification method of pattern writing apparatus and...

Creation method and conversion method of charged particle beam writ...

Method of forming pattern writing data by using charged particle beam

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM WRITING APPARATUS AND IRRADIATION TIME APPORT...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS, INSPECTION APPARATUS A...

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM WRITING APPARATUS AND METHOD OF SAME

CHARGED PARTICLE BEAM WRITING APPARATUS AND CHARGED PARTICLE BEAM W...

CHARGED PARTICLE BEAM PATTERN FORMING APPARATUS AND CHARGED PARTICL...

CHARGED PARTICLE BEAM DRAWING APPARATUS AND CONTROL METHOD THEREOF

CHARGED PARTICLE BEAM DRAWING APPARATUS AND PROXIMITY EFFECT CORREC...

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS THEREFOR

CHARGED PARTICLE BEAM WRITING METHOD AND APPARATUS THEREFOR

CHARGED PARTICLE BEAM DRAWING METHOD AND APPARATUS

WRITE ERROR VERIFICATION METHOD OF WRITING APPARATUS AND CREATION A...

CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND CHARGED PARTICLE BE...

DATA VERIFICATION METHOD, CHARGED PARTICLE BEAM WRITING APPARATUS,...

WRITING ERROR VERIFICATION METHOD OF PATTERN WRITING APPARATUS AND...

METHOD OF FORMING PATTERN WRITING DATA BY USING CHARGED PARTICLE BEAM

CREATION METHOD AND CONVERSION METHOD OF CHARGED PARTICLE BEAM WRIT...