Akihito FUSHIMI

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Etching method and plasma processing apparatus
- Patent number 11,373,895
- Issue date Jun 28, 2022
- Tokyo Electron Limited
- Fumiaki Ariyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 10,410,902
- Issue date Sep 10, 2019
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 10,141,164
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Yasuharu Sasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of adsorbing target object on mounting table and plasma proc...
- Patent number 9,953,854
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20210005503
- Publication date Jan 7, 2021
- TOKYO ELECTRON LIMITED
- Fumiaki ARIYOSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180204757
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Akihito FUSHIMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20180204756
- Publication date Jul 19, 2018
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF ADSORBING TARGET OBJECT ON MOUNTING TABLE AND PLASMA PROC...
- Publication number 20150135514
- Publication date May 21, 2015
- TOKYO ELECTRON LIMITED
- Yasuharu Sasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150090692
- Publication date Apr 2, 2015
- TOKYO ELECTRON LIMITED
- Yasuharu SASAKI
- H01 - BASIC ELECTRIC ELEMENTS