Akihito ONO

Person

KITAKYUSHU-SHI, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrostatic chuck including a heater element with mutiple heating...
- Patent number 12,341,049
- Issue date Jun 24, 2025
- Toto Ltd.
- Akihito Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck
- Patent number 12,341,050
- Issue date Jun 24, 2025
- Toto Ltd.
- Akihito Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
- Patent number 11,830,755
- Issue date Nov 28, 2023
- Toto Ltd.
- Akihito Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
- Patent number 11,776,836
- Issue date Oct 3, 2023
- Toto Ltd.
- Akihito Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and semiconductor manufacturing apparatus
- Patent number 11,756,820
- Issue date Sep 12, 2023
- Toto Ltd.
- Akihito Ono
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20230317495
- Publication date Oct 5, 2023
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20230317493
- Publication date Oct 5, 2023
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20230317494
- Publication date Oct 5, 2023
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20230311258
- Publication date Oct 5, 2023
- TOTO LTD.
- Akihito ONO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20220310433
- Publication date Sep 29, 2022
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20220102183
- Publication date Mar 31, 2022
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20220102184
- Publication date Mar 31, 2022
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20220102181
- Publication date Mar 31, 2022
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20220102182
- Publication date Mar 31, 2022
- TOTO LTD.
- Akihito ONO
- H01 - BASIC ELECTRIC ELEMENTS

Akihito ONO

Person

Patents Grantslast 30 patents

Electrostatic chuck including a heater element with mutiple heating...

Electrostatic chuck

Electrostatic chuck and semiconductor manufacturing apparatus

Electrostatic chuck and semiconductor manufacturing apparatus

Electrostatic chuck and semiconductor manufacturing apparatus

Patents Applicationslast 30 patents

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS

ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS