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Akiho Maeda
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Takefu, JP
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last 30 patents
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Patent Grant
Method and apparatus for producing silicon single crystal
Patent number
5,248,378
Issue date
Sep 28, 1993
Shin-Etsu Handotai Co., Ltd.
Tetsuhiro Oda
C30 - CRYSTAL GROWTH
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Patent Grant
Conical portion growth control method and apparatus
Patent number
5,223,078
Issue date
Jun 29, 1993
Shin-Etsu Handotai Company, Limited
Akiho Maeda
C30 - CRYSTAL GROWTH
Information
Patent Grant
Method of forming a temperature pattern of heater and silicon singl...
Patent number
5,089,238
Issue date
Feb 18, 1992
Shin-Etsu Handotai Company Limited
Kenji Araki
C30 - CRYSTAL GROWTH