Akihoko Ikegaya

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Hyogo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus for polishing a hard material-coated wafer
- Patent number 6,428,399
- Issue date Aug 6, 2002
- Sumitomo Electric Industries, Ltd.
- Keiichiro Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of polishing a hard material-coated wafer
- Patent number 6,193,585
- Issue date Feb 27, 2001
- Sumitomo Electric Industries, Ltd.
- Keiichiro Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hard material-coated wafer, method of making same, polishing appara...
- Patent number 5,855,998
- Issue date Jan 5, 1999
- Sumitomo Electric Industries, Ltd.
- Keiichiro Tanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...