Akikazu Tanimoto

Person

Yokohama, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,939,739
- Issue date Apr 10, 2018
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 9,304,392
- Issue date Apr 5, 2016
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,780,327
- Issue date Jul 15, 2014
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,760,617
- Issue date Jun 24, 2014
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,384,877
- Issue date Feb 26, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,174,668
- Issue date May 8, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,169,592
- Issue date May 1, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,130,363
- Issue date Mar 6, 2012
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,072,576
- Issue date Dec 6, 2011
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 8,004,653
- Issue date Aug 23, 2011
- Nikon Corporation
- Naoyuki Kobayashi
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,995,187
- Issue date Aug 9, 2011
- Naoyuki Kobayashi
Information Patent Grant
Interferometric position-measuring devices and methods
- Patent number 7,876,452
- Issue date Jan 25, 2011
- Nikon Corporation
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Grant
Exposure apparatus and method for producing device
- Patent number 7,388,649
- Issue date Jun 17, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and methods utilizing plural mask and object sta...
- Patent number 6,894,763
- Issue date May 17, 2005
- Nikon Corporation
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for pattern exposure and method for adjusting...
- Patent number 6,727,980
- Issue date Apr 27, 2004
- Nikon Corporation
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light exposure apparatus
- Patent number 6,713,747
- Issue date Mar 30, 2004
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental-control method and apparatus for an exposure system
- Patent number 6,704,088
- Issue date Mar 9, 2004
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment method and exposure apparatus for use in such alignment m...
- Patent number 5,906,901
- Issue date May 25, 1999
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Slit-scanning type light exposure apparatus
- Patent number 5,831,716
- Issue date Nov 3, 1998
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Slit-scanning type light exposure apparatus
- Patent number 5,663,784
- Issue date Sep 2, 1997
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removing a thin film layer
- Patent number 5,656,229
- Issue date Aug 12, 1997
- Nikon Corporation
- Akikazu Tanimoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for removing a thin film layer
- Patent number 5,597,590
- Issue date Jan 28, 1997
- Nikon Corporation
- Akikazu Tanimoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of and apparatus for measuring coordinate position and posit...
- Patent number 5,151,749
- Issue date Sep 29, 1992
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illuminating optical system in an exposure apparatus
- Patent number 5,048,926
- Issue date Sep 17, 1991
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Laser beam transmitting apparatus
- Patent number 5,018,848
- Issue date May 28, 1991
- Nikon Corporation
- Saburo Kamiya
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Exposure control device
- Patent number 4,970,546
- Issue date Nov 13, 1990
- Nikon Corporation
- Kazuaki Suzuki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus capable of adjusting the light amount
- Patent number 4,884,101
- Issue date Nov 28, 1989
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 4,870,452
- Issue date Sep 26, 1989
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for detecting position of reference pattern
- Patent number 4,860,374
- Issue date Aug 22, 1989
- Nikon Corporation
- Seiro Murakami
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Exposure apparatus
- Patent number 4,853,745
- Issue date Aug 1, 1989
- Nikon Corporation
- Saburo Kamiya
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20180196352
- Publication date Jul 12, 2018
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20160216612
- Publication date Jul 28, 2016
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20140293249
- Publication date Oct 2, 2014
- Nikon Corporation
- Naoyuki KOBAYASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20130169945
- Publication date Jul 4, 2013
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, MEASUREMENT METHOD, AND DEVICE...
- Publication number 20130016329
- Publication date Jan 17, 2013
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleaning method, device manufacturing method, cleaning substrate, l...
- Publication number 20120057139
- Publication date Mar 8, 2012
- Nikon Corporation
- Akikazu TANIMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20110199594
- Publication date Aug 18, 2011
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Cleaning tool, cleaning method, and device fabricating method
- Publication number 20100039628
- Publication date Feb 18, 2010
- Nikon Corporation
- Kenichi Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Method and Apparatus, and Electronic Device Manufacturing...
- Publication number 20090011368
- Publication date Jan 8, 2009
- Yutaka Ichihara
- G02 - OPTICS
Information Patent Application
INTERFEROMETRIC POSITION-MEASURING DEVICES AND METHODS
- Publication number 20080291464
- Publication date Nov 27, 2008
- NIKON CORPORATION
- Michael R. Sogard
- G01 - MEASURING TESTING
Information Patent Application
Exposure Apparatus and method for producing device
- Publication number 20080231825
- Publication date Sep 25, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080225249
- Publication date Sep 18, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080225250
- Publication date Sep 18, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080030695
- Publication date Feb 7, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20080030696
- Publication date Feb 7, 2008
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE
- Publication number 20070247600
- Publication date Oct 25, 2007
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20070132968
- Publication date Jun 14, 2007
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20070064210
- Publication date Mar 22, 2007
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and method for producing device
- Publication number 20060077367
- Publication date Apr 13, 2006
- Nikon Corporation
- Naoyuki Kobayashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and methods utilizing plural mask and object sta...
- Publication number 20030218730
- Publication date Nov 27, 2003
- NIKON CORPORATION
- Seiro Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental-control method and apparatus for an exposure system
- Publication number 20030164929
- Publication date Sep 4, 2003
- Nikon Corporation
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Light exposure apparatus
- Publication number 20020190189
- Publication date Dec 19, 2002
- NIKON CORPORATION
- Akikazu Tanimoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Apparatus and method for pattern exposure and method for adjusting...
- Publication number 20020041368
- Publication date Apr 11, 2002
- NIKON CORPORATION
- Kazuya Ota
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Akikazu Tanimoto

Person

Patents Grantslast 30 patents

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Interferometric position-measuring devices and methods

Exposure apparatus and method for producing device

Exposure apparatus and methods utilizing plural mask and object sta...

Apparatus and method for pattern exposure and method for adjusting...

Light exposure apparatus

Environmental-control method and apparatus for an exposure system

Alignment method and exposure apparatus for use in such alignment m...

Slit-scanning type light exposure apparatus

Slit-scanning type light exposure apparatus

Method for removing a thin film layer

Apparatus for removing a thin film layer

Method of and apparatus for measuring coordinate position and posit...

Illuminating optical system in an exposure apparatus

Laser beam transmitting apparatus

Exposure control device

Apparatus capable of adjusting the light amount

Projection exposure apparatus

Apparatus for detecting position of reference pattern

Exposure apparatus

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, MEASUREMENT METHOD, AND DEVICE...

Cleaning method, device manufacturing method, cleaning substrate, l...

Exposure apparatus and method for producing device

Cleaning tool, cleaning method, and device fabricating method

Exposure Method and Apparatus, and Electronic Device Manufacturing...

INTERFEROMETRIC POSITION-MEASURING DEVICES AND METHODS

Exposure Apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

EXPOSURE APPARATUS AND METHOD FOR PRODUCING DEVICE

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and method for producing device

Exposure apparatus and methods utilizing plural mask and object sta...

Environmental-control method and apparatus for an exposure system

Light exposure apparatus

Apparatus and method for pattern exposure and method for adjusting...