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Akiko Harumoto
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Kamigyo-ku, JP
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last 30 patents
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Patent Grant
Substrate processing apparatus
Patent number
7,604,424
Issue date
Oct 20, 2009
Sokudo Co., Ltd.
Kazuhito Shigemori
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE TREATING METHOD AND SUBSTRATE TREATING APPARATUS
Publication number
20240170297
Publication date
May 23, 2024
SCREEN Holdings Co., Ltd.
Yosuke HANAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20100081097
Publication date
Apr 1, 2010
Sokudo Co., Ltd.
Koji Kaneyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Substrate processing apparatus
Publication number
20060291854
Publication date
Dec 28, 2006
Dainippon Screen Mfg. Co., Ltd.
Koji Kaneyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate processing apparatus
Publication number
20060291855
Publication date
Dec 28, 2006
Dainippon Screen Mfg. Co., Ltd.
Kazuhito Shigemori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY