Akiko Kai

Person

Koshi City, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Developing treatment method and developing treatment apparatus
- Patent number 11,960,209
- Issue date Apr 16, 2024
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method, recording medium and substrate process...
- Patent number 11,848,189
- Issue date Dec 19, 2023
- Tokyo Electron Limited
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,823,918
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Developing treatment method, computer storage medium and developing...
- Patent number 11,720,026
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing apparatus and rec...
- Patent number 11,508,589
- Issue date Nov 22, 2022
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,488,846
- Issue date Nov 1, 2022
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,972,512
- Issue date May 15, 2018
- Tokyo Electron Limited
- Akiko Kai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Liquid processing method, memory medium and liquid processing appar...
- Patent number 9,786,488
- Issue date Oct 10, 2017
- Tokyo Electron Limited
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220068670
- Publication date Mar 3, 2022
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210134615
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...
- Publication number 20210066097
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Takahiro Shiozawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING TREATMENT METHOD AND DEVELOPING TREATMENT APPARATUS
- Publication number 20210063885
- Publication date Mar 4, 2021
- TOKYO ELECTRON LIMITED
- Akiko KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK
- Publication number 20200357662
- Publication date Nov 12, 2020
- TOKYO ELECTRON LIMITED
- Tomohiko MUTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVELOPING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND DEVELOPING...
- Publication number 20200064742
- Publication date Feb 27, 2020
- TOKYO ELECTRON LIMITED
- Akiko KAI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...
- Publication number 20190096706
- Publication date Mar 28, 2019
- TOKYO ELECTRON LIMITED
- Akiko Kai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20180019112
- Publication date Jan 18, 2018
- TOKYO ELECTRON LIMITED
- Akiko KAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...
- Publication number 20160096203
- Publication date Apr 7, 2016
- TOKYO ELECTRON LIMITED
- Akiko Kai
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Developing treatment method and developing treatment apparatus

Substrate processing method, recording medium and substrate process...

Substrate processing method and substrate processing apparatus

Developing treatment method, computer storage medium and developing...

Substrate processing method, substrate processing apparatus and rec...

Substrate processing method and substrate processing apparatus

Liquid processing method, memory medium and liquid processing appar...

Liquid processing method, memory medium and liquid processing appar...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING METHOD, RECORDING MEDIUM AND SUBSTRATE PROCESS...

DEVELOPING TREATMENT METHOD AND DEVELOPING TREATMENT APPARATUS

TANK, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF USING THE TANK

DEVELOPING TREATMENT METHOD, COMPUTER STORAGE MEDIUM AND DEVELOPING...

SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS AND REC...

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...

LIQUID PROCESSING METHOD, MEMORY MEDIUM AND LIQUID PROCESSING APPAR...