Akiko Kiyotomi

Person

Koshi city, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,823,922
- Issue date Nov 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Treatment condition setting method, storage medium, and substrate t...
- Patent number 11,726,438
- Issue date Aug 15, 2023
- Tokyo Electron Limited
- Takuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Coating film forming apparatus and adjustment method therefor
- Patent number 11,676,844
- Issue date Jun 13, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate defect inspection method, storage medium, and substrate d...
- Patent number 11,669,955
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Shin Inoue
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection apparatus, substrate processing apparatus, sub...
- Patent number 11,609,502
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate processing apparatus, method of adjusting parameters of c...
- Patent number 11,467,496
- Issue date Oct 11, 2022
- Tokyo Electron Limited
- Akiko Kiyotomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection method, substrate inspection apparatus and rec...
- Patent number 11,378,388
- Issue date Jul 5, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate inspection method and substrate inspection apparatus
- Patent number 11,268,912
- Issue date Mar 8, 2022
- Tokyo Electron Limited
- Kazuya Hisano
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus, method of adjusting parameters of c...
- Patent number 10,901,318
- Issue date Jan 26, 2021
- Tokyo Electron Limited
- Akiko Kiyotomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of adjusting parameters of c...
- Patent number 10,670,966
- Issue date Jun 2, 2020
- Tokyo Electron Limited
- Akiko Kiyotomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatment solution supply apparatus, treatment solution supply meth...
- Patent number 9,308,542
- Issue date Apr 12, 2016
- Tokyo Electron Limited
- Akiko Kiyotomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
WARPAGE AMOUNT ESTIMATION APPARATUS AND WARPAGE AMOUNT ESTIMATION M...
- Publication number 20230386873
- Publication date Nov 30, 2023
- TOKYO ELECTRON LIMITED
- Akiko KIYOTOMI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
- Publication number 20230333531
- Publication date Oct 19, 2023
- TOKYO ELECTRON LIMITED
- Takuya MORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20230197480
- Publication date Jun 22, 2023
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...
- Publication number 20210166365
- Publication date Jun 3, 2021
- Tokyo Electron Limited
- Shin INOUE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...
- Publication number 20210103219
- Publication date Apr 8, 2021
- TOKYO ELECTRON LIMITED
- Akiko KIYOTOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...
- Publication number 20200393803
- Publication date Dec 17, 2020
- Tokyo Electron Limited
- Takuya MORI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...
- Publication number 20200285156
- Publication date Sep 10, 2020
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...
- Publication number 20200257201
- Publication date Aug 13, 2020
- TOKYO ELECTRON LIMITED
- Akiko KIYOTOMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...
- Publication number 20200096321
- Publication date Mar 26, 2020
- TOKYO ELECTRON LIMITED
- Kazuya Hisano
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE INSPECTION METHOD AND SUBSTRATE INSPECTION APPARATUS
- Publication number 20200025692
- Publication date Jan 23, 2020
- TOKYO ELECTRON LIMITED
- Kazuya HISANO
- G01 - MEASURING TESTING
Information Patent Application
COATING FILM FORMING APPARATUS AND ADJUSTMENT METHOD THEREFOR
- Publication number 20190378739
- Publication date Dec 12, 2019
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...
- Publication number 20190155158
- Publication date May 23, 2019
- TOKYO ELECTRON LIMITED
- Akiko KIYOTOMI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TREATMENT SOLUTION SUPPLY APPARATUS, TREATMENT SOLUTION SUPPLY METH...
- Publication number 20140158791
- Publication date Jun 12, 2014
- TOKYO ELECTRON LIMITED
- Akiko Kiyotomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Akiko Kiyotomi

Person

Patents Grantslast 30 patents

Substrate inspection apparatus, substrate processing apparatus, sub...

Treatment condition setting method, storage medium, and substrate t...

Coating film forming apparatus and adjustment method therefor

Substrate defect inspection method, storage medium, and substrate d...

Substrate inspection apparatus, substrate processing apparatus, sub...

Substrate processing apparatus, method of adjusting parameters of c...

Substrate inspection method, substrate inspection apparatus and rec...

Substrate inspection method and substrate inspection apparatus

Substrate processing apparatus, method of adjusting parameters of c...

Substrate processing apparatus, method of adjusting parameters of c...

Treatment solution supply apparatus, treatment solution supply meth...

Patents Applicationslast 30 patents

WARPAGE AMOUNT ESTIMATION APPARATUS AND WARPAGE AMOUNT ESTIMATION M...

TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE DEFECT INSPECTION METHOD, STORAGE MEDIUM, AND SUBSTRATE D...

SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...

TREATMENT CONDITION SETTING METHOD, STORAGE MEDIUM, AND SUBSTRATE T...

SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUB...

SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...

SUBSTRATE INSPECTION METHOD, SUBSTRATE INSPECTION APPARATUS AND REC...

SUBSTRATE INSPECTION METHOD AND SUBSTRATE INSPECTION APPARATUS

COATING FILM FORMING APPARATUS AND ADJUSTMENT METHOD THEREFOR

SUBSTRATE PROCESSING APPARATUS, METHOD OF ADJUSTING PARAMETERS OF C...

TREATMENT SOLUTION SUPPLY APPARATUS, TREATMENT SOLUTION SUPPLY METH...