Akiko Tanaka

Follow

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus
- Patent number 6,692,165
- Issue date Feb 17, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Akiko Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and apparatus for supplying developing solution onto subs...
- Patent number 6,076,979
- Issue date Jun 20, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Developing apparatus and developing method
- Patent number 5,984,540
- Issue date Nov 16, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Masahiro Mimasaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing apparatus
- Publication number 20020121341
- Publication date Sep 5, 2002
- Dainippon Screen Mfg. Co., Ltd.
- Akiko Tanaka
- H01 - BASIC ELECTRIC ELEMENTS